JPH031739Y2 - - Google Patents
Info
- Publication number
- JPH031739Y2 JPH031739Y2 JP1988164463U JP16446388U JPH031739Y2 JP H031739 Y2 JPH031739 Y2 JP H031739Y2 JP 1988164463 U JP1988164463 U JP 1988164463U JP 16446388 U JP16446388 U JP 16446388U JP H031739 Y2 JPH031739 Y2 JP H031739Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- air supply
- filter
- clean room
- filter box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000011144 upstream manufacturing Methods 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 235000009508 confectionery Nutrition 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988164463U JPH031739Y2 (US07922777-20110412-C00004.png) | 1988-12-21 | 1988-12-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988164463U JPH031739Y2 (US07922777-20110412-C00004.png) | 1988-12-21 | 1988-12-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01120037U JPH01120037U (US07922777-20110412-C00004.png) | 1989-08-15 |
JPH031739Y2 true JPH031739Y2 (US07922777-20110412-C00004.png) | 1991-01-18 |
Family
ID=31450094
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988164463U Expired JPH031739Y2 (US07922777-20110412-C00004.png) | 1988-12-21 | 1988-12-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH031739Y2 (US07922777-20110412-C00004.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4798816B2 (ja) * | 1999-06-08 | 2011-10-19 | 高砂熱学工業株式会社 | 循環型クリーンルーム |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5629732B2 (US07922777-20110412-C00004.png) * | 1974-10-03 | 1981-07-10 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS602501Y2 (ja) * | 1979-08-14 | 1985-01-24 | ダイキンプラント株式会社 | 空気清浄機 |
-
1988
- 1988-12-21 JP JP1988164463U patent/JPH031739Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5629732B2 (US07922777-20110412-C00004.png) * | 1974-10-03 | 1981-07-10 |
Also Published As
Publication number | Publication date |
---|---|
JPH01120037U (US07922777-20110412-C00004.png) | 1989-08-15 |
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