JPH0316279Y2 - - Google Patents
Info
- Publication number
- JPH0316279Y2 JPH0316279Y2 JP11834186U JP11834186U JPH0316279Y2 JP H0316279 Y2 JPH0316279 Y2 JP H0316279Y2 JP 11834186 U JP11834186 U JP 11834186U JP 11834186 U JP11834186 U JP 11834186U JP H0316279 Y2 JPH0316279 Y2 JP H0316279Y2
- Authority
- JP
- Japan
- Prior art keywords
- processing tank
- liquid processing
- bellows
- semiconductor manufacturing
- chemical solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 48
- 239000000126 substance Substances 0.000 claims description 44
- 239000004065 semiconductor Substances 0.000 claims description 37
- 238000004519 manufacturing process Methods 0.000 claims description 30
- 235000012431 wafers Nutrition 0.000 claims description 8
- 230000005856 abnormality Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010129 solution processing Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Weting (AREA)
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Cleaning By Liquid Or Steam (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11834186U JPH0316279Y2 (enrdf_load_stackoverflow) | 1986-07-31 | 1986-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11834186U JPH0316279Y2 (enrdf_load_stackoverflow) | 1986-07-31 | 1986-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6324828U JPS6324828U (enrdf_load_stackoverflow) | 1988-02-18 |
| JPH0316279Y2 true JPH0316279Y2 (enrdf_load_stackoverflow) | 1991-04-08 |
Family
ID=31004706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11834186U Expired JPH0316279Y2 (enrdf_load_stackoverflow) | 1986-07-31 | 1986-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316279Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001262383A (ja) * | 2000-01-12 | 2001-09-26 | Nippon Paint Co Ltd | アルミニウム缶ボディーの酸洗浄方法 |
-
1986
- 1986-07-31 JP JP11834186U patent/JPH0316279Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6324828U (enrdf_load_stackoverflow) | 1988-02-18 |
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