JPH0315976B2 - - Google Patents

Info

Publication number
JPH0315976B2
JPH0315976B2 JP58114233A JP11423383A JPH0315976B2 JP H0315976 B2 JPH0315976 B2 JP H0315976B2 JP 58114233 A JP58114233 A JP 58114233A JP 11423383 A JP11423383 A JP 11423383A JP H0315976 B2 JPH0315976 B2 JP H0315976B2
Authority
JP
Japan
Prior art keywords
gas
catalyst
layer
sensitive
catalyst layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58114233A
Other languages
English (en)
Japanese (ja)
Other versions
JPS607353A (ja
Inventor
Tadashi Sakai
Osamu Takigawa
Masaki Katsura
Masayuki Shiratori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP11423383A priority Critical patent/JPS607353A/ja
Publication of JPS607353A publication Critical patent/JPS607353A/ja
Publication of JPH0315976B2 publication Critical patent/JPH0315976B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP11423383A 1983-06-27 1983-06-27 感ガス素子 Granted JPS607353A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11423383A JPS607353A (ja) 1983-06-27 1983-06-27 感ガス素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11423383A JPS607353A (ja) 1983-06-27 1983-06-27 感ガス素子

Publications (2)

Publication Number Publication Date
JPS607353A JPS607353A (ja) 1985-01-16
JPH0315976B2 true JPH0315976B2 (enrdf_load_stackoverflow) 1991-03-04

Family

ID=14632579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11423383A Granted JPS607353A (ja) 1983-06-27 1983-06-27 感ガス素子

Country Status (1)

Country Link
JP (1) JPS607353A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004111628A1 (ja) * 2003-06-12 2004-12-23 Riken Keiki Co., Ltd. 接触燃焼式ガスセンサ、及びその製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01189553A (ja) * 1988-01-25 1989-07-28 Riken Corp ガスセンサー用酸化スズ半導体およびその製造方法
JP4849620B2 (ja) * 2006-12-07 2012-01-11 富士電機株式会社 薄膜ガスセンサおよびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54104392A (en) * 1978-02-02 1979-08-16 Toshiba Corp Gas sensitive element
JPS56168544A (en) * 1980-05-30 1981-12-24 Toyota Motor Corp Resistor type gas sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004111628A1 (ja) * 2003-06-12 2004-12-23 Riken Keiki Co., Ltd. 接触燃焼式ガスセンサ、及びその製造方法
JPWO2004111628A1 (ja) * 2003-06-12 2006-07-20 理研計器株式会社 接触燃焼式ガスセンサ、及びその製造方法

Also Published As

Publication number Publication date
JPS607353A (ja) 1985-01-16

Similar Documents

Publication Publication Date Title
JP2829416B2 (ja) 感ガス素子
JPS58124943A (ja) マイクロヒ−タ付き限界電流式酸素センサとそれを用いた限界電流式酸素濃度検出装置
US4276535A (en) Thermistor
KR20040062625A (ko) 박막 에탄올 센서 및 그 제조방법
JPH0418261B2 (enrdf_load_stackoverflow)
JPH0315976B2 (enrdf_load_stackoverflow)
JPH09166567A (ja) 半導体式ガスセンサ及びその製造方法
JPS6152420B2 (enrdf_load_stackoverflow)
JP2001291607A (ja) 白金薄膜抵抗体の製造方法
US4198850A (en) Gas sensors
JP4010738B2 (ja) ガスセンサ及びガス検出器及びガス検出方法
JPH01189553A (ja) ガスセンサー用酸化スズ半導体およびその製造方法
JPH0531104B2 (enrdf_load_stackoverflow)
JPH0862168A (ja) 窒素酸化物検出素子
RU2102735C1 (ru) Твердотельный газовый сенсор
US4303490A (en) Exhaust electrode process for exhaust gas oxygen sensor
JPH11108872A (ja) 触媒性積層装置
JP2005226992A (ja) 薄膜ガスセンサの製造方法
JPH0228823B2 (enrdf_load_stackoverflow)
RU2100801C1 (ru) Твердотельный газовый сенсор
JP2753654B2 (ja) 感湿素子
JPH06148112A (ja) 水素ガス検知素子
JPH0390848A (ja) ガスセンサ
JPH065220B2 (ja) 酸素濃度検出器
JPS6152423B2 (enrdf_load_stackoverflow)