JPH0315975B2 - - Google Patents

Info

Publication number
JPH0315975B2
JPH0315975B2 JP58149483A JP14948383A JPH0315975B2 JP H0315975 B2 JPH0315975 B2 JP H0315975B2 JP 58149483 A JP58149483 A JP 58149483A JP 14948383 A JP14948383 A JP 14948383A JP H0315975 B2 JPH0315975 B2 JP H0315975B2
Authority
JP
Japan
Prior art keywords
gas
electrode
hydrogen
voltage
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58149483A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6040945A (ja
Inventor
Kentaro Ito
Tetsuya Kubo
Yukio Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hochiki Corp
Original Assignee
Hochiki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochiki Corp filed Critical Hochiki Corp
Priority to JP14948383A priority Critical patent/JPS6040945A/ja
Publication of JPS6040945A publication Critical patent/JPS6040945A/ja
Publication of JPH0315975B2 publication Critical patent/JPH0315975B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP14948383A 1983-08-16 1983-08-16 半導体ガスセンサ Granted JPS6040945A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14948383A JPS6040945A (ja) 1983-08-16 1983-08-16 半導体ガスセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14948383A JPS6040945A (ja) 1983-08-16 1983-08-16 半導体ガスセンサ

Publications (2)

Publication Number Publication Date
JPS6040945A JPS6040945A (ja) 1985-03-04
JPH0315975B2 true JPH0315975B2 (enrdf_load_stackoverflow) 1991-03-04

Family

ID=15476134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14948383A Granted JPS6040945A (ja) 1983-08-16 1983-08-16 半導体ガスセンサ

Country Status (1)

Country Link
JP (1) JPS6040945A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003329592A (ja) * 2002-05-08 2003-11-19 Shinji Okazaki ガスセンサ用の膜の製造方法
WO2007116919A1 (ja) * 2006-04-04 2007-10-18 Japan Atomic Energy Agency 水素ガス検知材とその被膜方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004013678A1 (de) * 2004-03-18 2005-10-20 Micronas Gmbh Vorrichtung zur Detektion eines Gases oder Gasgemischs
WO2021210453A1 (ja) * 2020-04-16 2021-10-21 ヌヴォトンテクノロジージャパン株式会社 水素センサ、水素検知方法および水素検知装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3032476A1 (de) * 1980-08-28 1982-04-01 Siemens AG, 1000 Berlin und 8000 München Selektiver duennschicht-gassensor hoher empfindlichkeit und stabilitaet zum nachweis und zur messung von gasfoermigen kohlenwasserstoff-verunreinigungen in der luft auf der basis von wolframoxid (wo(pfeil abwaerts)x(pfeil abwaerts))-halbleitern, sowie ein verfahren zu seiner herstellung

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003329592A (ja) * 2002-05-08 2003-11-19 Shinji Okazaki ガスセンサ用の膜の製造方法
WO2007116919A1 (ja) * 2006-04-04 2007-10-18 Japan Atomic Energy Agency 水素ガス検知材とその被膜方法

Also Published As

Publication number Publication date
JPS6040945A (ja) 1985-03-04

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