JPH03120029U - - Google Patents

Info

Publication number
JPH03120029U
JPH03120029U JP2943190U JP2943190U JPH03120029U JP H03120029 U JPH03120029 U JP H03120029U JP 2943190 U JP2943190 U JP 2943190U JP 2943190 U JP2943190 U JP 2943190U JP H03120029 U JPH03120029 U JP H03120029U
Authority
JP
Japan
Prior art keywords
substrate
developing device
protrusion
substrate holder
developer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2943190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2943190U priority Critical patent/JPH03120029U/ja
Publication of JPH03120029U publication Critical patent/JPH03120029U/ja
Pending legal-status Critical Current

Links

JP2943190U 1990-03-22 1990-03-22 Pending JPH03120029U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2943190U JPH03120029U (en:Method) 1990-03-22 1990-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2943190U JPH03120029U (en:Method) 1990-03-22 1990-03-22

Publications (1)

Publication Number Publication Date
JPH03120029U true JPH03120029U (en:Method) 1991-12-10

Family

ID=31532188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2943190U Pending JPH03120029U (en:Method) 1990-03-22 1990-03-22

Country Status (1)

Country Link
JP (1) JPH03120029U (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010278094A (ja) * 2009-05-27 2010-12-09 Tokyo Electron Ltd 現像処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010278094A (ja) * 2009-05-27 2010-12-09 Tokyo Electron Ltd 現像処理装置
TWI384333B (zh) * 2009-05-27 2013-02-01 Tokyo Electron Ltd Development processing device

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