JPH0311379B2 - - Google Patents
Info
- Publication number
- JPH0311379B2 JPH0311379B2 JP58027700A JP2770083A JPH0311379B2 JP H0311379 B2 JPH0311379 B2 JP H0311379B2 JP 58027700 A JP58027700 A JP 58027700A JP 2770083 A JP2770083 A JP 2770083A JP H0311379 B2 JPH0311379 B2 JP H0311379B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- chamber
- intake
- room
- intake chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007613 environmental effect Effects 0.000 claims description 18
- 239000000428 dust Substances 0.000 claims description 3
- 238000004378 air conditioning Methods 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 13
- 230000003749 cleanliness Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000001143 conditioned effect Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 241000894006 Bacteria Species 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007905 drug manufacturing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58027700A JPS59157432A (ja) | 1983-02-23 | 1983-02-23 | 組替式局所環境制御室 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58027700A JPS59157432A (ja) | 1983-02-23 | 1983-02-23 | 組替式局所環境制御室 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59157432A JPS59157432A (ja) | 1984-09-06 |
JPH0311379B2 true JPH0311379B2 (xx) | 1991-02-15 |
Family
ID=12228252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58027700A Granted JPS59157432A (ja) | 1983-02-23 | 1983-02-23 | 組替式局所環境制御室 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59157432A (xx) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60196535A (ja) * | 1984-03-19 | 1985-10-05 | Nec Corp | 天井移動型局所空気高清浄装置 |
JPS6172947A (ja) * | 1984-09-18 | 1986-04-15 | Takasago Thermal Eng Co Ltd | クリ−ンル−ムの形成法およびこの方法に使用する空気調和設備ユニツト |
JPS6176837A (ja) * | 1984-09-22 | 1986-04-19 | Shinko Kogyo Kk | 清浄作業室 |
JPS61104102U (xx) * | 1984-12-13 | 1986-07-02 | ||
JPS61145240U (xx) * | 1985-02-27 | 1986-09-08 | ||
JPS6399140U (xx) * | 1986-12-12 | 1988-06-27 | ||
JPS6425643U (xx) * | 1987-08-05 | 1989-02-13 | ||
JPH0220030U (xx) * | 1988-07-25 | 1990-02-09 | ||
DE59205885D1 (de) * | 1991-02-01 | 1996-05-09 | Meissner & Wurst | Filter-Ventilator-Einrichtung zur Verwendung bei Reinräumen |
CN102418964A (zh) * | 2010-09-27 | 2012-04-18 | 上海风神环境设备工程有限公司 | 无风道活动顶棚送风空调装置 |
EP2820356B1 (de) * | 2012-03-02 | 2019-11-13 | ABN Cleanroom Technology N.V. | Anlage zur belüftung von reinräumen |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5131567U (xx) * | 1974-08-29 | 1976-03-08 | ||
JPS56168050A (en) * | 1980-05-28 | 1981-12-24 | Hitachi Plant Eng & Constr Co Ltd | Gas circulator |
-
1983
- 1983-02-23 JP JP58027700A patent/JPS59157432A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5131567U (xx) * | 1974-08-29 | 1976-03-08 | ||
JPS56168050A (en) * | 1980-05-28 | 1981-12-24 | Hitachi Plant Eng & Constr Co Ltd | Gas circulator |
Also Published As
Publication number | Publication date |
---|---|
JPS59157432A (ja) | 1984-09-06 |
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