JPH0311101B2 - - Google Patents

Info

Publication number
JPH0311101B2
JPH0311101B2 JP61150740A JP15074086A JPH0311101B2 JP H0311101 B2 JPH0311101 B2 JP H0311101B2 JP 61150740 A JP61150740 A JP 61150740A JP 15074086 A JP15074086 A JP 15074086A JP H0311101 B2 JPH0311101 B2 JP H0311101B2
Authority
JP
Japan
Prior art keywords
substrate
installation block
crystal growth
board
growth chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61150740A
Other languages
English (en)
Japanese (ja)
Other versions
JPS636858A (ja
Inventor
Kazuo Nanbu
Junji Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61150740A priority Critical patent/JPS636858A/ja
Publication of JPS636858A publication Critical patent/JPS636858A/ja
Publication of JPH0311101B2 publication Critical patent/JPH0311101B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Relays Between Conveyors (AREA)
JP61150740A 1986-06-26 1986-06-26 基板搬送機構 Granted JPS636858A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61150740A JPS636858A (ja) 1986-06-26 1986-06-26 基板搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61150740A JPS636858A (ja) 1986-06-26 1986-06-26 基板搬送機構

Publications (2)

Publication Number Publication Date
JPS636858A JPS636858A (ja) 1988-01-12
JPH0311101B2 true JPH0311101B2 (enrdf_load_html_response) 1991-02-15

Family

ID=15503378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61150740A Granted JPS636858A (ja) 1986-06-26 1986-06-26 基板搬送機構

Country Status (1)

Country Link
JP (1) JPS636858A (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5387067A (en) * 1993-01-14 1995-02-07 Applied Materials, Inc. Direct load/unload semiconductor wafer cassette apparatus and transfer system
JP6643029B2 (ja) 2015-10-06 2020-02-12 東洋炭素株式会社 単結晶炭化ケイ素基板の加熱処理容器及びエッチング方法

Also Published As

Publication number Publication date
JPS636858A (ja) 1988-01-12

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees