JPH0310603Y2 - - Google Patents
Info
- Publication number
- JPH0310603Y2 JPH0310603Y2 JP1984132287U JP13228784U JPH0310603Y2 JP H0310603 Y2 JPH0310603 Y2 JP H0310603Y2 JP 1984132287 U JP1984132287 U JP 1984132287U JP 13228784 U JP13228784 U JP 13228784U JP H0310603 Y2 JPH0310603 Y2 JP H0310603Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holder
- arm
- spring
- holding member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 4
- 238000009434 installation Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984132287U JPH0310603Y2 (de) | 1984-08-31 | 1984-08-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984132287U JPH0310603Y2 (de) | 1984-08-31 | 1984-08-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6148647U JPS6148647U (de) | 1986-04-01 |
JPH0310603Y2 true JPH0310603Y2 (de) | 1991-03-15 |
Family
ID=30690854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984132287U Expired JPH0310603Y2 (de) | 1984-08-31 | 1984-08-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0310603Y2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2776858B2 (ja) * | 1989-01-06 | 1998-07-16 | 株式会社日立製作所 | 電子顕微鏡用バルク試料ホールダ |
JP4542786B2 (ja) * | 2002-04-08 | 2010-09-15 | イー エイ フィシオネ インストルメンツ インコーポレーテッド | 試料保持装置 |
EP2824448B1 (de) * | 2013-07-08 | 2016-12-14 | Bruker Nano GmbH | Probenhalter für Elektronenrückstreuungsbeugung |
EP3699948A1 (de) * | 2019-02-21 | 2020-08-26 | FEI Company | Probenhalter für ein ladungsträgerteilchenmikroskop |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5024072A (de) * | 1973-07-04 | 1975-03-14 | ||
JPS54140874A (en) * | 1978-04-24 | 1979-11-01 | Jeol Ltd | Sample holder |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52126744U (de) * | 1976-03-24 | 1977-09-27 |
-
1984
- 1984-08-31 JP JP1984132287U patent/JPH0310603Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5024072A (de) * | 1973-07-04 | 1975-03-14 | ||
JPS54140874A (en) * | 1978-04-24 | 1979-11-01 | Jeol Ltd | Sample holder |
Also Published As
Publication number | Publication date |
---|---|
JPS6148647U (de) | 1986-04-01 |
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