JPH029321Y2 - - Google Patents
Info
- Publication number
- JPH029321Y2 JPH029321Y2 JP8122284U JP8122284U JPH029321Y2 JP H029321 Y2 JPH029321 Y2 JP H029321Y2 JP 8122284 U JP8122284 U JP 8122284U JP 8122284 U JP8122284 U JP 8122284U JP H029321 Y2 JPH029321 Y2 JP H029321Y2
- Authority
- JP
- Japan
- Prior art keywords
- clean
- air
- hood
- tunnel
- clean hood
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007664 blowing Methods 0.000 claims description 18
- 238000012423 maintenance Methods 0.000 claims description 16
- 230000001143 conditioned effect Effects 0.000 claims description 7
- 238000004080 punching Methods 0.000 description 7
- 230000003749 cleanliness Effects 0.000 description 6
- 238000004378 air conditioning Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8122284U JPS60194230U (ja) | 1984-06-02 | 1984-06-02 | クリ−ントンネル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8122284U JPS60194230U (ja) | 1984-06-02 | 1984-06-02 | クリ−ントンネル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60194230U JPS60194230U (ja) | 1985-12-24 |
| JPH029321Y2 true JPH029321Y2 (en:Method) | 1990-03-07 |
Family
ID=30627803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8122284U Granted JPS60194230U (ja) | 1984-06-02 | 1984-06-02 | クリ−ントンネル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60194230U (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2522007Y2 (ja) * | 1990-09-06 | 1997-01-08 | 株式会社竹中工務店 | クリーンルーム装置 |
-
1984
- 1984-06-02 JP JP8122284U patent/JPS60194230U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60194230U (ja) | 1985-12-24 |
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