JPH0287069U - - Google Patents
Info
- Publication number
- JPH0287069U JPH0287069U JP16674088U JP16674088U JPH0287069U JP H0287069 U JPH0287069 U JP H0287069U JP 16674088 U JP16674088 U JP 16674088U JP 16674088 U JP16674088 U JP 16674088U JP H0287069 U JPH0287069 U JP H0287069U
- Authority
- JP
- Japan
- Prior art keywords
- processing
- processing chambers
- workpiece
- processed
- central axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16674088U JPH0287069U (enExample) | 1988-12-26 | 1988-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16674088U JPH0287069U (enExample) | 1988-12-26 | 1988-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0287069U true JPH0287069U (enExample) | 1990-07-10 |
Family
ID=31454394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16674088U Pending JPH0287069U (enExample) | 1988-12-26 | 1988-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0287069U (enExample) |
-
1988
- 1988-12-26 JP JP16674088U patent/JPH0287069U/ja active Pending
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