JPH028199Y2 - - Google Patents

Info

Publication number
JPH028199Y2
JPH028199Y2 JP1980076088U JP7608880U JPH028199Y2 JP H028199 Y2 JPH028199 Y2 JP H028199Y2 JP 1980076088 U JP1980076088 U JP 1980076088U JP 7608880 U JP7608880 U JP 7608880U JP H028199 Y2 JPH028199 Y2 JP H028199Y2
Authority
JP
Japan
Prior art keywords
sample
electron beam
rays
ray
cpu
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980076088U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57653U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980076088U priority Critical patent/JPH028199Y2/ja
Publication of JPS57653U publication Critical patent/JPS57653U/ja
Application granted granted Critical
Publication of JPH028199Y2 publication Critical patent/JPH028199Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1980076088U 1980-05-30 1980-05-30 Expired JPH028199Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980076088U JPH028199Y2 (en:Method) 1980-05-30 1980-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980076088U JPH028199Y2 (en:Method) 1980-05-30 1980-05-30

Publications (2)

Publication Number Publication Date
JPS57653U JPS57653U (en:Method) 1982-01-05
JPH028199Y2 true JPH028199Y2 (en:Method) 1990-02-27

Family

ID=29438745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980076088U Expired JPH028199Y2 (en:Method) 1980-05-30 1980-05-30

Country Status (1)

Country Link
JP (1) JPH028199Y2 (en:Method)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109897A (en) * 1978-02-16 1979-08-28 Jeol Ltd Specimen analytical apparatus in scanning electron microscope or the like

Also Published As

Publication number Publication date
JPS57653U (en:Method) 1982-01-05

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