JPH0279036U - - Google Patents

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Publication number
JPH0279036U
JPH0279036U JP15868988U JP15868988U JPH0279036U JP H0279036 U JPH0279036 U JP H0279036U JP 15868988 U JP15868988 U JP 15868988U JP 15868988 U JP15868988 U JP 15868988U JP H0279036 U JPH0279036 U JP H0279036U
Authority
JP
Japan
Prior art keywords
support member
magnet
distal end
flat
presser bodies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15868988U
Other languages
English (en)
Other versions
JPH0632686Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988158689U priority Critical patent/JPH0632686Y2/ja
Publication of JPH0279036U publication Critical patent/JPH0279036U/ja
Application granted granted Critical
Publication of JPH0632686Y2 publication Critical patent/JPH0632686Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案の実施例を示す斜視図、第２図
は従来のものを示す斜視図である。 １……支持部材、２……ウエハ、３……押え体
、３ａ……押え体の先端部、４……磁石、５……
摘み片。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエハ等の薄板を密接して載置する平面板状の
    支持部材と、該支持部材の表面に載置した複数個
    の押え体とから成り、前記支持部材を、これに磁
    石を磁着できるものに構成する一方、前記各押え
    体における下面のうち少なくとも先端部の下面を
    平面に構成し、更に、前記各押え体には、その先
    端部から適宜距離を隔てた部位に、前記支持部材
    に対して磁着する磁石を設けたことを特徴とする
    半導体チツプ用ウエハ等の薄板の取付け装置。
JP1988158689U 1988-12-06 1988-12-06 半導体チップ用ウェハの取付け装置 Expired - Fee Related JPH0632686Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988158689U JPH0632686Y2 (ja) 1988-12-06 1988-12-06 半導体チップ用ウェハの取付け装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988158689U JPH0632686Y2 (ja) 1988-12-06 1988-12-06 半導体チップ用ウェハの取付け装置

Publications (2)

Publication Number Publication Date
JPH0279036U true JPH0279036U (ja) 1990-06-18
JPH0632686Y2 JPH0632686Y2 (ja) 1994-08-24

Family

ID=31439240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988158689U Expired - Fee Related JPH0632686Y2 (ja) 1988-12-06 1988-12-06 半導体チップ用ウェハの取付け装置

Country Status (1)

Country Link
JP (1) JPH0632686Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001176955A (ja) * 1999-10-29 2001-06-29 Boc Group Inc:The 傷つきやすい基板のためのばねクリップ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844848U (ja) * 1981-09-21 1983-03-25 日本電気株式会社 半導体ウエハ−固定用治具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844848U (ja) * 1981-09-21 1983-03-25 日本電気株式会社 半導体ウエハ−固定用治具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001176955A (ja) * 1999-10-29 2001-06-29 Boc Group Inc:The 傷つきやすい基板のためのばねクリップ
JP4556052B2 (ja) * 1999-10-29 2010-10-06 フェローテック （ユーエスエイ） コーポレイション 基板支持装置

Also Published As

Publication number Publication date
JPH0632686Y2 (ja) 1994-08-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees