JPH0258240B2 - - Google Patents
Info
- Publication number
- JPH0258240B2 JPH0258240B2 JP21310085A JP21310085A JPH0258240B2 JP H0258240 B2 JPH0258240 B2 JP H0258240B2 JP 21310085 A JP21310085 A JP 21310085A JP 21310085 A JP21310085 A JP 21310085A JP H0258240 B2 JPH0258240 B2 JP H0258240B2
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- weight sensor
- capacity
- growth
- load cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21310085A JPS6272589A (ja) | 1985-09-26 | 1985-09-26 | 単結晶引上げ方法およびその装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21310085A JPS6272589A (ja) | 1985-09-26 | 1985-09-26 | 単結晶引上げ方法およびその装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6272589A JPS6272589A (ja) | 1987-04-03 |
JPH0258240B2 true JPH0258240B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-07 |
Family
ID=16633569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21310085A Granted JPS6272589A (ja) | 1985-09-26 | 1985-09-26 | 単結晶引上げ方法およびその装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6272589A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2567098Y2 (ja) * | 1991-05-20 | 1998-03-30 | 株式会社壽 | 筆記具 |
JP5776899B2 (ja) * | 2011-04-19 | 2015-09-09 | ティアック株式会社 | ロードセルユニット |
-
1985
- 1985-09-26 JP JP21310085A patent/JPS6272589A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6272589A (ja) | 1987-04-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101218847B1 (ko) | 단결정 잉곳 직경 제어시스템 및 이를 포함하는 단결정 잉곳 성장장치 | |
JP7416958B2 (ja) | 圧電結晶秤量結晶成長装置および動作方法 | |
JPS63242991A (ja) | 結晶径制御方法 | |
JP2678383B2 (ja) | 単結晶上装置 | |
CN110257903A (zh) | 自动降籽晶过程中自动定位至原生籽晶处终止下降的方法 | |
JPH0258240B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
JPH10185545A (ja) | 石英ルツボの形状測定装置 | |
JP4039055B2 (ja) | 単結晶の育成方法および育成装置 | |
US6294017B1 (en) | Growth of semiconductor single crystals | |
JP2563327B2 (ja) | 単結晶の直径制御方法及び装置 | |
CN111982958A (zh) | 籽晶熔化厚度检测装置 | |
CN107142519A (zh) | 一种测量晶体硅铸锭过程中温度梯度的方法和装置 | |
CN116428998B (zh) | 一种晶棒直径测量装置及测量方法 | |
JPS60176989A (ja) | 単結晶の製造方法 | |
JP3041990B2 (ja) | 単結晶育成方法及び装置 | |
JPH05208893A (ja) | 単結晶引上げ装置およびその制御方法 | |
CN113897672A (zh) | 一种适用提拉法的单晶生长直径控制装置 | |
CN114150373A (zh) | 一种基于力矩平衡的铌酸锂晶棒定量生长控制装置 | |
JPH0255289A (ja) | 高解離圧化合物半導体単結晶成長方法及びその装置 | |
JPH10185546A (ja) | 石英ルツボの形状測定装置 | |
JPH05194082A (ja) | 単結晶製造方法およびその装置 | |
JPS6296389A (ja) | 単結晶製造装置 | |
SU1533371A1 (ru) | Способ контрол процесса кристаллизации из расплава | |
JPH09315887A (ja) | 単結晶の製造方法及びそれに用いられる単結晶製造装置 | |
JPS63282188A (ja) | 単結晶製造装置 |