JPS6272589A - 単結晶引上げ方法およびその装置 - Google Patents
単結晶引上げ方法およびその装置Info
- Publication number
- JPS6272589A JPS6272589A JP21310085A JP21310085A JPS6272589A JP S6272589 A JPS6272589 A JP S6272589A JP 21310085 A JP21310085 A JP 21310085A JP 21310085 A JP21310085 A JP 21310085A JP S6272589 A JPS6272589 A JP S6272589A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- weight sensor
- capacity
- load cell
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 83
- 238000000034 method Methods 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 claims abstract description 11
- 230000035945 sensitivity Effects 0.000 claims abstract description 10
- 238000010899 nucleation Methods 0.000 claims description 14
- 238000005259 measurement Methods 0.000 claims description 12
- 239000002994 raw material Substances 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 4
- 238000004033 diameter control Methods 0.000 claims description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21310085A JPS6272589A (ja) | 1985-09-26 | 1985-09-26 | 単結晶引上げ方法およびその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21310085A JPS6272589A (ja) | 1985-09-26 | 1985-09-26 | 単結晶引上げ方法およびその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6272589A true JPS6272589A (ja) | 1987-04-03 |
| JPH0258240B2 JPH0258240B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-07 |
Family
ID=16633569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21310085A Granted JPS6272589A (ja) | 1985-09-26 | 1985-09-26 | 単結晶引上げ方法およびその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6272589A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04128886U (ja) * | 1991-05-20 | 1992-11-25 | 株式会社壽 | 筆記具 |
| JP2012233868A (ja) * | 2011-04-19 | 2012-11-29 | Teac Corp | ロードセルユニット |
-
1985
- 1985-09-26 JP JP21310085A patent/JPS6272589A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04128886U (ja) * | 1991-05-20 | 1992-11-25 | 株式会社壽 | 筆記具 |
| JP2012233868A (ja) * | 2011-04-19 | 2012-11-29 | Teac Corp | ロードセルユニット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0258240B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-07 |
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