JPH0256773B2 - - Google Patents

Info

Publication number
JPH0256773B2
JPH0256773B2 JP60116624A JP11662485A JPH0256773B2 JP H0256773 B2 JPH0256773 B2 JP H0256773B2 JP 60116624 A JP60116624 A JP 60116624A JP 11662485 A JP11662485 A JP 11662485A JP H0256773 B2 JPH0256773 B2 JP H0256773B2
Authority
JP
Japan
Prior art keywords
sample
objective lens
interference member
interference
sample stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60116624A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61277143A (ja
Inventor
Tsugio Kurata
Shigeki Kamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP60116624A priority Critical patent/JPS61277143A/ja
Publication of JPS61277143A publication Critical patent/JPS61277143A/ja
Publication of JPH0256773B2 publication Critical patent/JPH0256773B2/ja
Granted legal-status Critical Current

Links

JP60116624A 1985-05-31 1985-05-31 電子顕微鏡の試料移動装置 Granted JPS61277143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60116624A JPS61277143A (ja) 1985-05-31 1985-05-31 電子顕微鏡の試料移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60116624A JPS61277143A (ja) 1985-05-31 1985-05-31 電子顕微鏡の試料移動装置

Publications (2)

Publication Number Publication Date
JPS61277143A JPS61277143A (ja) 1986-12-08
JPH0256773B2 true JPH0256773B2 (enrdf_load_stackoverflow) 1990-12-03

Family

ID=14691797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60116624A Granted JPS61277143A (ja) 1985-05-31 1985-05-31 電子顕微鏡の試料移動装置

Country Status (1)

Country Link
JP (1) JPS61277143A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2869977B2 (ja) * 1988-09-06 1999-03-10 日本電気株式会社 半導体集積回路の断面観察用治具
JP2006040761A (ja) * 2004-07-28 2006-02-09 Hitachi High-Technologies Corp 荷電粒子線装置
JP5114338B2 (ja) * 2008-08-08 2013-01-09 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JPS61277143A (ja) 1986-12-08

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