JPS61277143A - 電子顕微鏡の試料移動装置 - Google Patents

電子顕微鏡の試料移動装置

Info

Publication number
JPS61277143A
JPS61277143A JP60116624A JP11662485A JPS61277143A JP S61277143 A JPS61277143 A JP S61277143A JP 60116624 A JP60116624 A JP 60116624A JP 11662485 A JP11662485 A JP 11662485A JP S61277143 A JPS61277143 A JP S61277143A
Authority
JP
Japan
Prior art keywords
sample
objective lens
interference member
interference
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60116624A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0256773B2 (enrdf_load_stackoverflow
Inventor
Tsugio Kurata
倉田　次男
Shigeki Kamata
鎌田　茂機
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP60116624A priority Critical patent/JPS61277143A/ja
Publication of JPS61277143A publication Critical patent/JPS61277143A/ja
Publication of JPH0256773B2 publication Critical patent/JPH0256773B2/ja
Granted legal-status Critical Current

Links

JP60116624A 1985-05-31 1985-05-31 電子顕微鏡の試料移動装置 Granted JPS61277143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60116624A JPS61277143A (ja) 1985-05-31 1985-05-31 電子顕微鏡の試料移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60116624A JPS61277143A (ja) 1985-05-31 1985-05-31 電子顕微鏡の試料移動装置

Publications (2)

Publication Number Publication Date
JPS61277143A true JPS61277143A (ja) 1986-12-08
JPH0256773B2 JPH0256773B2 (enrdf_load_stackoverflow) 1990-12-03

Family

ID=14691797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60116624A Granted JPS61277143A (ja) 1985-05-31 1985-05-31 電子顕微鏡の試料移動装置

Country Status (1)

Country Link
JP (1) JPS61277143A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0271542A (ja) * 1988-09-06 1990-03-12 Nec Corp 半導体集積回路の断面観察用治具
JP2006040761A (ja) * 2004-07-28 2006-02-09 Hitachi High-Technologies Corp 荷電粒子線装置
JP2010040460A (ja) * 2008-08-08 2010-02-18 Hitachi High-Technologies Corp 荷電粒子線装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0271542A (ja) * 1988-09-06 1990-03-12 Nec Corp 半導体集積回路の断面観察用治具
JP2006040761A (ja) * 2004-07-28 2006-02-09 Hitachi High-Technologies Corp 荷電粒子線装置
JP2010040460A (ja) * 2008-08-08 2010-02-18 Hitachi High-Technologies Corp 荷電粒子線装置

Also Published As

Publication number Publication date
JPH0256773B2 (enrdf_load_stackoverflow) 1990-12-03

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