JPH0256612B2 - - Google Patents

Info

Publication number
JPH0256612B2
JPH0256612B2 JP57115981A JP11598182A JPH0256612B2 JP H0256612 B2 JPH0256612 B2 JP H0256612B2 JP 57115981 A JP57115981 A JP 57115981A JP 11598182 A JP11598182 A JP 11598182A JP H0256612 B2 JPH0256612 B2 JP H0256612B2
Authority
JP
Japan
Prior art keywords
heat
flow rate
heating element
rate detector
sensitive flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57115981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS595919A (ja
Inventor
Hiroshi Sato
Koji Tanimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57115981A priority Critical patent/JPS595919A/ja
Publication of JPS595919A publication Critical patent/JPS595919A/ja
Publication of JPH0256612B2 publication Critical patent/JPH0256612B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP57115981A 1982-07-01 1982-07-01 感熱形流量検出器 Granted JPS595919A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57115981A JPS595919A (ja) 1982-07-01 1982-07-01 感熱形流量検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57115981A JPS595919A (ja) 1982-07-01 1982-07-01 感熱形流量検出器

Publications (2)

Publication Number Publication Date
JPS595919A JPS595919A (ja) 1984-01-12
JPH0256612B2 true JPH0256612B2 (enEXAMPLES) 1990-11-30

Family

ID=14675916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57115981A Granted JPS595919A (ja) 1982-07-01 1982-07-01 感熱形流量検出器

Country Status (1)

Country Link
JP (1) JPS595919A (enEXAMPLES)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2132484B (en) * 1982-12-23 1986-07-02 Tampax Ltd Tampon applicator
US4829818A (en) * 1983-12-27 1989-05-16 Honeywell Inc. Flow sensor housing
JPS61138168A (ja) * 1984-12-10 1986-06-25 Tokyo Keiso Kk 熱電式流速計
JPH0642209Y2 (ja) * 1989-02-03 1994-11-02 東レ株式会社 フローセンサ
JP3423083B2 (ja) * 1994-10-17 2003-07-07 神奈川県 流量計センサ
JP2002081982A (ja) * 2000-09-08 2002-03-22 Horiba Ltd 赤外線ガス検出器用フローセンサおよびフローセンサの製造方法
JP2007319769A (ja) * 2006-05-31 2007-12-13 Casio Comput Co Ltd 反応装置、その反応装置を用いた発電装置、及び、電子機器

Also Published As

Publication number Publication date
JPS595919A (ja) 1984-01-12

Similar Documents

Publication Publication Date Title
JP3364115B2 (ja) 感熱式流量検出素子
US7021136B2 (en) Mass flow meter with symmetrical sensors
KR960015067B1 (ko) 실리콘 베이스 질량 기류 센서 및 그 조립방법
JP3825242B2 (ja) フローセンサ
JP5315304B2 (ja) 熱式流量計
JPS61170618A (ja) 流速検出用半導体センサ
KR19990006263A (ko) 유량 검출소자 및 그것을 사용한 유량센서
CN104482971A (zh) 一种基于mems技术的热式流量传感器
US20210396562A1 (en) Flow sensing device
US6378365B1 (en) Micromachined thermal flowmeter having heating element disposed in a silicon island
JPH0256612B2 (enEXAMPLES)
JPH06160203A (ja) 流動媒体の温度を測定するための温度センサー
JPS61124861A (ja) 湿度検出用素子
JP2008180739A (ja) フローセンサ
JP2619735B2 (ja) 熱流量センサ
JP2016151472A (ja) 接触燃焼式ガスセンサ
JP2001153707A (ja) フローセンサ
JPS58214814A (ja) 感熱形流量検出器
JP2002286519A (ja) 熱式流速センサ
JPS60171420A (ja) 感熱形流量検出器
JPS61125157A (ja) 冷却用集積素子
JPH0593732A (ja) フローセンサ
JPS61124856A (ja) 湿度検出用素子
JP3423083B2 (ja) 流量計センサ
JP3318924B2 (ja) 熱線式流量センサ