JPH0255285A - 石英ルツボの製造方法 - Google Patents

石英ルツボの製造方法

Info

Publication number
JPH0255285A
JPH0255285A JP20477888A JP20477888A JPH0255285A JP H0255285 A JPH0255285 A JP H0255285A JP 20477888 A JP20477888 A JP 20477888A JP 20477888 A JP20477888 A JP 20477888A JP H0255285 A JPH0255285 A JP H0255285A
Authority
JP
Japan
Prior art keywords
mold
quartz
heating
crucible
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20477888A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0585515B2 (cs
Inventor
Shin Takeshita
武下　臣
Nobuyuki Tateno
立野　信之
Nobuya Watanabe
渡辺　乃扶也
Alexander Winterburn John
ジョン・アレキサンダー・ウインターバン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON KOJUNDO SEKIEI KK
Saint Gobain Quartz Ltd
Mitsubishi Metal Corp
Original Assignee
NIPPON KOJUNDO SEKIEI KK
TSL Group PLC
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON KOJUNDO SEKIEI KK, TSL Group PLC, Mitsubishi Metal Corp filed Critical NIPPON KOJUNDO SEKIEI KK
Priority to JP20477888A priority Critical patent/JPH0255285A/ja
Publication of JPH0255285A publication Critical patent/JPH0255285A/ja
Publication of JPH0585515B2 publication Critical patent/JPH0585515B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP20477888A 1988-08-19 1988-08-19 石英ルツボの製造方法 Granted JPH0255285A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20477888A JPH0255285A (ja) 1988-08-19 1988-08-19 石英ルツボの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20477888A JPH0255285A (ja) 1988-08-19 1988-08-19 石英ルツボの製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP9067778A Division JP2736969B2 (ja) 1997-03-21 1997-03-21 石英ルツボ製造装置

Publications (2)

Publication Number Publication Date
JPH0255285A true JPH0255285A (ja) 1990-02-23
JPH0585515B2 JPH0585515B2 (cs) 1993-12-07

Family

ID=16496192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20477888A Granted JPH0255285A (ja) 1988-08-19 1988-08-19 石英ルツボの製造方法

Country Status (1)

Country Link
JP (1) JPH0255285A (cs)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0715342A3 (en) * 1994-11-30 1996-10-16 Heraeus Quarzglas Apparatus for heat treatment of individual wafers and method of manufacturing the reaction vessel used for treatment
US5651827A (en) * 1996-01-11 1997-07-29 Heraeus Quarzglas Gmbh Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same
WO2009054529A1 (ja) 2007-10-25 2009-04-30 Japan Super Quartz Corporation 石英ガラスルツボとその製造方法およびその用途
WO2009122936A1 (ja) 2008-03-31 2009-10-08 ジャパンスーパークォーツ株式会社 石英ガラスルツボとその製造方法
US8394198B2 (en) 2008-11-28 2013-03-12 Japan Super Quartz Corporation Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
JP2013212992A (ja) * 2008-12-19 2013-10-17 Shinetsu Quartz Prod Co Ltd 純粋且つ無気泡のるつぼ内層を有するシリカるつぼの製造方法
US8562739B2 (en) 2008-12-29 2013-10-22 Japan Super Quartz Corporation Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
US8951346B2 (en) 2008-12-09 2015-02-10 Japan Super Quartz Corporation Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
KR20220041649A (ko) * 2020-09-25 2022-04-01 주식회사 솔레드 반도체 링 제조장치 및 그를 이용한 반도체 링 제조방법
KR20220059639A (ko) * 2020-11-03 2022-05-10 주식회사 솔레드 반도체 링 제조장치 및 그를 이용한 반도체 링 제조방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850955A (ja) * 1981-09-22 1983-03-25 株式会社フオ−ブレイン レジン床義歯やクラウンの成形用レジンカプセル
JPS5934659A (ja) * 1982-08-20 1984-02-25 Toshiba Corp 固体撮像装置
JPH01157426A (ja) * 1987-12-15 1989-06-20 Toshiba Ceramics Co Ltd 石英ガラスルツボ製造装置
JPH01160836A (ja) * 1987-12-17 1989-06-23 Tokyo Ceramics Kk 石英ガラスルツボの製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850955A (ja) * 1981-09-22 1983-03-25 株式会社フオ−ブレイン レジン床義歯やクラウンの成形用レジンカプセル
JPS5934659A (ja) * 1982-08-20 1984-02-25 Toshiba Corp 固体撮像装置
JPH01157426A (ja) * 1987-12-15 1989-06-20 Toshiba Ceramics Co Ltd 石英ガラスルツボ製造装置
JPH01160836A (ja) * 1987-12-17 1989-06-23 Tokyo Ceramics Kk 石英ガラスルツボの製造方法

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0715342A3 (en) * 1994-11-30 1996-10-16 Heraeus Quarzglas Apparatus for heat treatment of individual wafers and method of manufacturing the reaction vessel used for treatment
US5651827A (en) * 1996-01-11 1997-07-29 Heraeus Quarzglas Gmbh Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same
WO2009054529A1 (ja) 2007-10-25 2009-04-30 Japan Super Quartz Corporation 石英ガラスルツボとその製造方法およびその用途
WO2009122936A1 (ja) 2008-03-31 2009-10-08 ジャパンスーパークォーツ株式会社 石英ガラスルツボとその製造方法
US8394198B2 (en) 2008-11-28 2013-03-12 Japan Super Quartz Corporation Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
US8951346B2 (en) 2008-12-09 2015-02-10 Japan Super Quartz Corporation Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
JP2013212992A (ja) * 2008-12-19 2013-10-17 Shinetsu Quartz Prod Co Ltd 純粋且つ無気泡のるつぼ内層を有するシリカるつぼの製造方法
US8562739B2 (en) 2008-12-29 2013-10-22 Japan Super Quartz Corporation Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
KR20220041649A (ko) * 2020-09-25 2022-04-01 주식회사 솔레드 반도체 링 제조장치 및 그를 이용한 반도체 링 제조방법
KR20220059639A (ko) * 2020-11-03 2022-05-10 주식회사 솔레드 반도체 링 제조장치 및 그를 이용한 반도체 링 제조방법

Also Published As

Publication number Publication date
JPH0585515B2 (cs) 1993-12-07

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