JPH0249724Y2 - - Google Patents
Info
- Publication number
- JPH0249724Y2 JPH0249724Y2 JP18935685U JP18935685U JPH0249724Y2 JP H0249724 Y2 JPH0249724 Y2 JP H0249724Y2 JP 18935685 U JP18935685 U JP 18935685U JP 18935685 U JP18935685 U JP 18935685U JP H0249724 Y2 JPH0249724 Y2 JP H0249724Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- shaped
- main body
- lid
- support plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002265 prevention Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 48
- 239000002245 particle Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18935685U JPH0249724Y2 (ko) | 1985-12-09 | 1985-12-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18935685U JPH0249724Y2 (ko) | 1985-12-09 | 1985-12-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6299575U JPS6299575U (ko) | 1987-06-25 |
JPH0249724Y2 true JPH0249724Y2 (ko) | 1990-12-27 |
Family
ID=31141580
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18935685U Expired JPH0249724Y2 (ko) | 1985-12-09 | 1985-12-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0249724Y2 (ko) |
-
1985
- 1985-12-09 JP JP18935685U patent/JPH0249724Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6299575U (ko) | 1987-06-25 |
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