JPH0249724Y2 - - Google Patents

Info

Publication number
JPH0249724Y2
JPH0249724Y2 JP18935685U JP18935685U JPH0249724Y2 JP H0249724 Y2 JPH0249724 Y2 JP H0249724Y2 JP 18935685 U JP18935685 U JP 18935685U JP 18935685 U JP18935685 U JP 18935685U JP H0249724 Y2 JPH0249724 Y2 JP H0249724Y2
Authority
JP
Japan
Prior art keywords
wafer
shaped
main body
lid
support plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18935685U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6299575U (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18935685U priority Critical patent/JPH0249724Y2/ja
Publication of JPS6299575U publication Critical patent/JPS6299575U/ja
Application granted granted Critical
Publication of JPH0249724Y2 publication Critical patent/JPH0249724Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP18935685U 1985-12-09 1985-12-09 Expired JPH0249724Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18935685U JPH0249724Y2 (ko) 1985-12-09 1985-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18935685U JPH0249724Y2 (ko) 1985-12-09 1985-12-09

Publications (2)

Publication Number Publication Date
JPS6299575U JPS6299575U (ko) 1987-06-25
JPH0249724Y2 true JPH0249724Y2 (ko) 1990-12-27

Family

ID=31141580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18935685U Expired JPH0249724Y2 (ko) 1985-12-09 1985-12-09

Country Status (1)

Country Link
JP (1) JPH0249724Y2 (ko)

Also Published As

Publication number Publication date
JPS6299575U (ko) 1987-06-25

Similar Documents

Publication Publication Date Title
US7316315B2 (en) Thin plate storage container and lid having at least one thin plate supporting member
US7216766B2 (en) Thin plate storage container with handled supporting member
TWI495605B (zh) Substrate storage container
US5228568A (en) Semiconductor wafer basket
US20050218034A1 (en) Lid unit for thin plate supporting container
US5725100A (en) Semiconductor wafer case
JPH08107141A (ja) ウェーハ収納容器のウェーハ抑え
JP4681484B2 (ja) 薄板収納容器用フック及び薄板収納容器
TWI634062B (zh) Substrate storage container
JPH0249724Y2 (ko)
JP4852023B2 (ja) リテーナ及び基板収納容器
JPH0563064A (ja) ウエーハ収納容器のウエーハ押え
JP2908985B2 (ja) ウェーハ収納容器のウェーハ抑え
JP2001025135A (ja) 蓋体の係止構造
JP3093068B2 (ja) ウェーハケース
JP3778958B2 (ja) 薄板用支持容器
JP2022540712A (ja) ウェハクッション、ウェハキャリアおよびウェハを支持する方法
JP4461325B2 (ja) ウエハ搬送容器
JPH0744020Y2 (ja) ウエーハ容器におけるウエーハ支持板
JPH092563A (ja) ディスクケース
JPH0729640Y2 (ja) ウェーハ容器の底部緩衝板
JP3180693B2 (ja) ウェーハ収納容器のウェーハ押え部材
JPH06204328A (ja) ウェーハケース
JPH0563065A (ja) ウエーハ収納容器のウエーハ押え
JPH0239867B2 (ko)