JPH0249707Y2 - - Google Patents
Info
- Publication number
- JPH0249707Y2 JPH0249707Y2 JP9556684U JP9556684U JPH0249707Y2 JP H0249707 Y2 JPH0249707 Y2 JP H0249707Y2 JP 9556684 U JP9556684 U JP 9556684U JP 9556684 U JP9556684 U JP 9556684U JP H0249707 Y2 JPH0249707 Y2 JP H0249707Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- substrate
- water
- master
- cleaning water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 24
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000005406 washing Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 description 5
- 238000001035 drying Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9556684U JPS6111155U (ja) | 1984-06-26 | 1984-06-26 | 基板現像機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9556684U JPS6111155U (ja) | 1984-06-26 | 1984-06-26 | 基板現像機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6111155U JPS6111155U (ja) | 1986-01-23 |
| JPH0249707Y2 true JPH0249707Y2 (enrdf_load_stackoverflow) | 1990-12-27 |
Family
ID=30654759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9556684U Granted JPS6111155U (ja) | 1984-06-26 | 1984-06-26 | 基板現像機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6111155U (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62244843A (ja) * | 1986-04-15 | 1987-10-26 | Toyo Commun Equip Co Ltd | カツトシ−トの重送及び異種シ−ト混入検出方法 |
| JPS62249852A (ja) * | 1986-04-23 | 1987-10-30 | Toyo Commun Equip Co Ltd | カツトシ−トの重送及び異種シ−ト混入検出方法 |
| JPH0717289B2 (ja) * | 1986-04-23 | 1995-03-01 | 東洋通信機株式会社 | カットシートの重送及び異種シート混入検出方式 |
| JPS62250346A (ja) * | 1986-04-23 | 1987-10-31 | Toyo Commun Equip Co Ltd | カツトシ−トの重送及び異種シ−ト混入検出方法 |
-
1984
- 1984-06-26 JP JP9556684U patent/JPS6111155U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6111155U (ja) | 1986-01-23 |
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