JPH0249421A - 拡散炉用炉心管の構造 - Google Patents

拡散炉用炉心管の構造

Info

Publication number
JPH0249421A
JPH0249421A JP1111858A JP11185889A JPH0249421A JP H0249421 A JPH0249421 A JP H0249421A JP 1111858 A JP1111858 A JP 1111858A JP 11185889 A JP11185889 A JP 11185889A JP H0249421 A JPH0249421 A JP H0249421A
Authority
JP
Japan
Prior art keywords
core tube
furnace core
cover body
furnace
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1111858A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542812B2 (enExample
Inventor
Susumu Inoue
進 井上
Isao Sakashita
坂下　伊佐男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP1111858A priority Critical patent/JPH0249421A/ja
Publication of JPH0249421A publication Critical patent/JPH0249421A/ja
Publication of JPH0542812B2 publication Critical patent/JPH0542812B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP1111858A 1989-04-28 1989-04-28 拡散炉用炉心管の構造 Granted JPH0249421A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1111858A JPH0249421A (ja) 1989-04-28 1989-04-28 拡散炉用炉心管の構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1111858A JPH0249421A (ja) 1989-04-28 1989-04-28 拡散炉用炉心管の構造

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP10458978A Division JPS5530869A (en) 1978-08-28 1978-08-28 Furnace core tube for use in diffusion furnace and method of washing same

Publications (2)

Publication Number Publication Date
JPH0249421A true JPH0249421A (ja) 1990-02-19
JPH0542812B2 JPH0542812B2 (enExample) 1993-06-29

Family

ID=14571924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1111858A Granted JPH0249421A (ja) 1989-04-28 1989-04-28 拡散炉用炉心管の構造

Country Status (1)

Country Link
JP (1) JPH0249421A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100703169B1 (ko) * 2004-08-26 2007-04-05 여환동 건축물의 단열, 방수구조 및 공법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185374A (enExample) * 1974-12-06 1976-07-26 Norton Co
JPS5222477A (en) * 1975-08-13 1977-02-19 Toshiba Ceramics Co Ltd Sic-si type equalizing tube for manufacturing gas impermeable semi conductors

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185374A (enExample) * 1974-12-06 1976-07-26 Norton Co
JPS5222477A (en) * 1975-08-13 1977-02-19 Toshiba Ceramics Co Ltd Sic-si type equalizing tube for manufacturing gas impermeable semi conductors

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100703169B1 (ko) * 2004-08-26 2007-04-05 여환동 건축물의 단열, 방수구조 및 공법

Also Published As

Publication number Publication date
JPH0542812B2 (enExample) 1993-06-29

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