JPH0247013B2 - - Google Patents
Info
- Publication number
- JPH0247013B2 JPH0247013B2 JP55112084A JP11208480A JPH0247013B2 JP H0247013 B2 JPH0247013 B2 JP H0247013B2 JP 55112084 A JP55112084 A JP 55112084A JP 11208480 A JP11208480 A JP 11208480A JP H0247013 B2 JPH0247013 B2 JP H0247013B2
- Authority
- JP
- Japan
- Prior art keywords
- support
- recording medium
- magnetic recording
- magnetic
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005291 magnetic effect Effects 0.000 claims description 30
- 239000002184 metal Substances 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 29
- 238000001704 evaporation Methods 0.000 claims description 21
- 230000008020 evaporation Effects 0.000 claims description 20
- 230000007246 mechanism Effects 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 7
- 230000000903 blocking effect Effects 0.000 claims 1
- 230000000630 rising effect Effects 0.000 description 18
- 238000000034 method Methods 0.000 description 16
- 239000010408 film Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 230000005294 ferromagnetic effect Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- -1 ferrous metals Chemical class 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920006267 polyester film Polymers 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910020637 Co-Cu Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910020710 Co—Sm Inorganic materials 0.000 description 1
- 229910020514 Co—Y Inorganic materials 0.000 description 1
- 229910017060 Fe Cr Inorganic materials 0.000 description 1
- 229910002544 Fe-Cr Inorganic materials 0.000 description 1
- 229910002549 Fe–Cu Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910018657 Mn—Al Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/20—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11208480A JPS5736437A (en) | 1980-08-14 | 1980-08-14 | Producing device of magnetic recording medium |
| US06/284,863 US4412507A (en) | 1980-08-14 | 1981-07-20 | Magnetic recording medium manufacturing device |
| GB8123504A GB2083840B (en) | 1980-08-14 | 1981-07-31 | Method and device for manufacturing magnetic recording medium |
| CA000383593A CA1165110A (en) | 1980-08-14 | 1981-08-11 | Magnetic recording medium manufacturing device |
| DE19813132106 DE3132106A1 (de) | 1980-08-14 | 1981-08-13 | Vorrichtung zur herstellung eines magnetischen aufzeichungsmediums |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11208480A JPS5736437A (en) | 1980-08-14 | 1980-08-14 | Producing device of magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5736437A JPS5736437A (en) | 1982-02-27 |
| JPH0247013B2 true JPH0247013B2 (enExample) | 1990-10-18 |
Family
ID=14577679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11208480A Granted JPS5736437A (en) | 1980-08-14 | 1980-08-14 | Producing device of magnetic recording medium |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4412507A (enExample) |
| JP (1) | JPS5736437A (enExample) |
| CA (1) | CA1165110A (enExample) |
| DE (1) | DE3132106A1 (enExample) |
| GB (1) | GB2083840B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4462332A (en) * | 1982-04-29 | 1984-07-31 | Energy Conversion Devices, Inc. | Magnetic gas gate |
| US4440107A (en) * | 1982-07-12 | 1984-04-03 | Energy Conversion Devices, Inc. | Magnetic apparatus for reducing substrate warpage |
| JPS6016319U (ja) * | 1983-07-14 | 1985-02-04 | 太陽誘電株式会社 | 真空蒸着による薄膜形成装置 |
| JPS60129933A (ja) * | 1983-12-17 | 1985-07-11 | Taiyo Yuden Co Ltd | ベ−スフイルムの走行方法 |
| CZ311698A3 (cs) * | 1996-04-03 | 1999-06-16 | Zakrytoe Aktsionernoe Obschestvo "Skb Istra" | Způsob a zařízení pro nanášení porézního povlaku na katodovou fólii elektrolytického kondenzátoru |
| GB2326647B (en) * | 1997-06-25 | 2001-12-19 | Gen Vacuum Equipment Ltd | Apparatus for and method of vacuum metallizing |
| JP2002235168A (ja) * | 2001-02-08 | 2002-08-23 | Sumitomo Electric Ind Ltd | 成膜方法および成膜装置 |
| EP1390964B1 (en) * | 2001-04-20 | 2011-12-07 | General Plasma, Inc. | Dipole ion source |
| DE10233137A1 (de) * | 2002-07-20 | 2004-02-05 | Applied Films Gmbh & Co. Kg | Vorrichtung zum Beschichten von Substraten |
| TWI328050B (en) * | 2005-05-10 | 2010-08-01 | Ulvac Inc | Reeling type plasma cvd device |
| JP2010280943A (ja) * | 2009-06-04 | 2010-12-16 | Sony Corp | 蒸着装置及び蒸着方法 |
| JP5803488B2 (ja) * | 2011-09-22 | 2015-11-04 | 凸版印刷株式会社 | 原子層堆積法によるフレキシブル基板への成膜方法及び成膜装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3342632A (en) * | 1964-08-05 | 1967-09-19 | Ibm | Magnetic coating |
| GB1596385A (en) * | 1976-12-29 | 1981-08-26 | Matsushita Electric Industrial Co Ltd | Methods and apparatus for manufacturing magnetic recording media |
-
1980
- 1980-08-14 JP JP11208480A patent/JPS5736437A/ja active Granted
-
1981
- 1981-07-20 US US06/284,863 patent/US4412507A/en not_active Expired - Lifetime
- 1981-07-31 GB GB8123504A patent/GB2083840B/en not_active Expired
- 1981-08-11 CA CA000383593A patent/CA1165110A/en not_active Expired
- 1981-08-13 DE DE19813132106 patent/DE3132106A1/de not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| GB2083840A (en) | 1982-03-31 |
| DE3132106A1 (de) | 1982-04-08 |
| US4412507A (en) | 1983-11-01 |
| JPS5736437A (en) | 1982-02-27 |
| GB2083840B (en) | 1985-04-03 |
| CA1165110A (en) | 1984-04-10 |
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