JPH024148B2 - - Google Patents

Info

Publication number
JPH024148B2
JPH024148B2 JP59213633A JP21363384A JPH024148B2 JP H024148 B2 JPH024148 B2 JP H024148B2 JP 59213633 A JP59213633 A JP 59213633A JP 21363384 A JP21363384 A JP 21363384A JP H024148 B2 JPH024148 B2 JP H024148B2
Authority
JP
Japan
Prior art keywords
discharge
electrode
main discharge
dielectric
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59213633A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6191982A (ja
Inventor
Hajime Nakatani
Takeo Haruta
Hitoshi Wakata
Yukio Sato
Haruhiko Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP21363384A priority Critical patent/JPS6191982A/ja
Priority to US06/782,568 priority patent/US4686682A/en
Priority to DE19853588088 priority patent/DE3588088T2/de
Priority to EP93100550A priority patent/EP0543795B1/en
Priority to EP94114362A priority patent/EP0637106B1/en
Priority to DE19853588118 priority patent/DE3588118T2/de
Priority to DE19853588137 priority patent/DE3588137T2/de
Priority to DE3587852T priority patent/DE3587852T2/de
Priority to EP85112484A priority patent/EP0177888B1/en
Priority to EP93100578A priority patent/EP0542718B1/en
Priority to CA000492327A priority patent/CA1259122A/en
Publication of JPS6191982A publication Critical patent/JPS6191982A/ja
Publication of JPH024148B2 publication Critical patent/JPH024148B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP21363384A 1984-10-09 1984-10-11 放電励起エキシマレ−ザ装置 Granted JPS6191982A (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP21363384A JPS6191982A (ja) 1984-10-11 1984-10-11 放電励起エキシマレ−ザ装置
US06/782,568 US4686682A (en) 1984-10-09 1985-10-01 Discharge excitation type short pulse laser device
DE19853588088 DE3588088T2 (de) 1984-10-09 1985-10-02 Entladungsangeregter Laser zur Erzeugung kurzer Pulse
EP93100550A EP0543795B1 (en) 1984-10-09 1985-10-02 Discharge excitation type short pulse laser device
EP94114362A EP0637106B1 (en) 1984-10-09 1985-10-02 Discharge excitation type laser device
DE19853588118 DE3588118T2 (de) 1984-10-09 1985-10-02 Entladungsangeregter Laser zur Erzeugung kurzer Pulse
DE19853588137 DE3588137T2 (de) 1984-10-09 1985-10-02 Entladungsangeregtes Lasergerät
DE3587852T DE3587852T2 (de) 1984-10-09 1985-10-02 Kurzpulslaservorrichtung vom Entladungsanregungstyp.
EP85112484A EP0177888B1 (en) 1984-10-09 1985-10-02 Discharge excitation type short pulse laser device
EP93100578A EP0542718B1 (en) 1984-10-09 1985-10-02 Discharge excitation type short pulse laser device
CA000492327A CA1259122A (en) 1984-10-09 1985-10-04 Discharge excitation type short pulse laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21363384A JPS6191982A (ja) 1984-10-11 1984-10-11 放電励起エキシマレ−ザ装置

Publications (2)

Publication Number Publication Date
JPS6191982A JPS6191982A (ja) 1986-05-10
JPH024148B2 true JPH024148B2 (enrdf_load_stackoverflow) 1990-01-26

Family

ID=16642383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21363384A Granted JPS6191982A (ja) 1984-10-09 1984-10-11 放電励起エキシマレ−ザ装置

Country Status (1)

Country Link
JP (1) JPS6191982A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6965624B2 (en) 1999-03-17 2005-11-15 Lambda Physik Ag Laser gas replenishment method
US6546036B1 (en) 1999-06-08 2003-04-08 Lambda Physik Ag Roof configuration for laser discharge electrodes
US6785316B1 (en) 1999-08-17 2004-08-31 Lambda Physik Ag Excimer or molecular laser with optimized spectral purity
US6570901B2 (en) 2000-02-24 2003-05-27 Lambda Physik Ag Excimer or molecular fluorine laser having lengthened electrodes

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58105161A (ja) * 1981-11-26 1983-06-22 Konishiroku Photo Ind Co Ltd 磁性トナ−

Also Published As

Publication number Publication date
JPS6191982A (ja) 1986-05-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term