JPH0237232B2 - - Google Patents
Info
- Publication number
- JPH0237232B2 JPH0237232B2 JP58120760A JP12076083A JPH0237232B2 JP H0237232 B2 JPH0237232 B2 JP H0237232B2 JP 58120760 A JP58120760 A JP 58120760A JP 12076083 A JP12076083 A JP 12076083A JP H0237232 B2 JPH0237232 B2 JP H0237232B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- solvent
- cleaning solvent
- cleaned
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 claims description 79
- 239000002904 solvent Substances 0.000 claims description 79
- 238000010438 heat treatment Methods 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 11
- 238000009835 boiling Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 230000006835 compression Effects 0.000 claims description 7
- 238000007906 compression Methods 0.000 claims description 7
- 238000005507 spraying Methods 0.000 claims description 6
- 239000007921 spray Substances 0.000 description 15
- 238000001816 cooling Methods 0.000 description 14
- 239000000243 solution Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 4
- 238000004821 distillation Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12076083A JPS6012187A (ja) | 1983-07-02 | 1983-07-02 | 洗浄方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12076083A JPS6012187A (ja) | 1983-07-02 | 1983-07-02 | 洗浄方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6012187A JPS6012187A (ja) | 1985-01-22 |
| JPH0237232B2 true JPH0237232B2 (ko) | 1990-08-23 |
Family
ID=14794311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12076083A Granted JPS6012187A (ja) | 1983-07-02 | 1983-07-02 | 洗浄方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6012187A (ko) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0744167B2 (ja) * | 1990-03-14 | 1995-05-15 | 株式会社ダン・クリーン・プロダクト | スプレー洗浄装置 |
| JP2596483B2 (ja) * | 1991-08-23 | 1997-04-02 | 坂東機工株式会社 | ガラス板の加工機械 |
| US5807166A (en) * | 1994-07-21 | 1998-09-15 | Bando Kiko Co., Ltd. | Glass-plate working machine |
| JP5423555B2 (ja) * | 2010-04-16 | 2014-02-19 | 株式会社デンソー | 洗浄乾燥方法および洗浄乾燥装置 |
| US9406501B2 (en) * | 2012-05-31 | 2016-08-02 | Semes Co., Ltd. | Apparatus and method for cleaning substrate |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5218594U (ko) * | 1975-07-28 | 1977-02-09 | ||
| JPS5546936A (en) * | 1978-09-06 | 1980-04-02 | Ekstroem H A B & Co | Mandrel that can be expanded |
| JPS588378U (ja) * | 1981-07-07 | 1983-01-19 | 内田 千年 | ２個の小物用収納袋にも転用できる着脱自在の防寒用襟及保温器用入部を兼備せる掛蒲団カバ− |
-
1983
- 1983-07-02 JP JP12076083A patent/JPS6012187A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5218594U (ko) * | 1975-07-28 | 1977-02-09 | ||
| JPS5546936A (en) * | 1978-09-06 | 1980-04-02 | Ekstroem H A B & Co | Mandrel that can be expanded |
| JPS588378U (ja) * | 1981-07-07 | 1983-01-19 | 内田 千年 | ２個の小物用収納袋にも転用できる着脱自在の防寒用襟及保温器用入部を兼備せる掛蒲団カバ− |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6012187A (ja) | 1985-01-22 |
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