JPH0234142B2 - - Google Patents

Info

Publication number
JPH0234142B2
JPH0234142B2 JP56025459A JP2545981A JPH0234142B2 JP H0234142 B2 JPH0234142 B2 JP H0234142B2 JP 56025459 A JP56025459 A JP 56025459A JP 2545981 A JP2545981 A JP 2545981A JP H0234142 B2 JPH0234142 B2 JP H0234142B2
Authority
JP
Japan
Prior art keywords
lens
selected area
sample
objective lens
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56025459A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57141851A (en
Inventor
Akira Yonezawa
Takashi Yanaka
Kohei Shirota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP2545981A priority Critical patent/JPS57141851A/ja
Publication of JPS57141851A publication Critical patent/JPS57141851A/ja
Publication of JPH0234142B2 publication Critical patent/JPH0234142B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP2545981A 1981-02-25 1981-02-25 Transmission-type electron microscope Granted JPS57141851A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2545981A JPS57141851A (en) 1981-02-25 1981-02-25 Transmission-type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2545981A JPS57141851A (en) 1981-02-25 1981-02-25 Transmission-type electron microscope

Publications (2)

Publication Number Publication Date
JPS57141851A JPS57141851A (en) 1982-09-02
JPH0234142B2 true JPH0234142B2 (fr) 1990-08-01

Family

ID=12166606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2545981A Granted JPS57141851A (en) 1981-02-25 1981-02-25 Transmission-type electron microscope

Country Status (1)

Country Link
JP (1) JPS57141851A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57212755A (en) * 1981-06-25 1982-12-27 Internatl Precision Inc Transmission-type electron microscope
JPS6113540A (ja) * 1984-06-28 1986-01-21 Internatl Precision Inc 電子顕微鏡

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029187A (ja) * 1983-07-26 1985-02-14 アカベ・オブ・スウエ−デン・アクチボラグ ミシンへ衣服を案内する方法およびこの方法を遂行するための自動ミシン

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029187A (ja) * 1983-07-26 1985-02-14 アカベ・オブ・スウエ−デン・アクチボラグ ミシンへ衣服を案内する方法およびこの方法を遂行するための自動ミシン

Also Published As

Publication number Publication date
JPS57141851A (en) 1982-09-02

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