JPH0234139B2 - - Google Patents

Info

Publication number
JPH0234139B2
JPH0234139B2 JP55143308A JP14330880A JPH0234139B2 JP H0234139 B2 JPH0234139 B2 JP H0234139B2 JP 55143308 A JP55143308 A JP 55143308A JP 14330880 A JP14330880 A JP 14330880A JP H0234139 B2 JPH0234139 B2 JP H0234139B2
Authority
JP
Japan
Prior art keywords
electron
aperture
alignment
lens
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55143308A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5767912A (en
Inventor
Mamoru Nakasuji
Kanji Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP55143308A priority Critical patent/JPS5767912A/ja
Publication of JPS5767912A publication Critical patent/JPS5767912A/ja
Publication of JPH0234139B2 publication Critical patent/JPH0234139B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP55143308A 1980-10-14 1980-10-14 Axis aligning method of electronic optical lens barrel Granted JPS5767912A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55143308A JPS5767912A (en) 1980-10-14 1980-10-14 Axis aligning method of electronic optical lens barrel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55143308A JPS5767912A (en) 1980-10-14 1980-10-14 Axis aligning method of electronic optical lens barrel

Publications (2)

Publication Number Publication Date
JPS5767912A JPS5767912A (en) 1982-04-24
JPH0234139B2 true JPH0234139B2 (enrdf_load_html_response) 1990-08-01

Family

ID=15335736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55143308A Granted JPS5767912A (en) 1980-10-14 1980-10-14 Axis aligning method of electronic optical lens barrel

Country Status (1)

Country Link
JP (1) JPS5767912A (enrdf_load_html_response)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6091540A (ja) * 1983-10-25 1985-05-22 Jeol Ltd 透過電子顕微鏡における軸合せ方法
JPH082400B2 (ja) * 1991-07-02 1996-01-17 三洋電機株式会社 アイロン
JP2006216299A (ja) * 2005-02-02 2006-08-17 Jeol Ltd 荷電粒子線装置及び荷電粒子線装置における収差補正器の軸合わせ方法
JP4628230B2 (ja) * 2005-09-16 2011-02-09 日本電子株式会社 荷電粒子線偏向装置
JP4928987B2 (ja) * 2006-03-08 2012-05-09 株式会社日立ハイテクノロジーズ 荷電粒子線調整方法及び荷電粒子線装置
DE102009028013B9 (de) 2009-07-24 2014-04-17 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät
JP2014212063A (ja) * 2013-04-19 2014-11-13 日本電子株式会社 走査荷電粒子顕微鏡、走査荷電粒子顕微鏡の制御方法、および走査荷電粒子顕微鏡の軸合わせ方法
JP6959969B2 (ja) * 2016-01-29 2021-11-05 株式会社日立ハイテク 荷電粒子線装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152456A (en) * 1978-05-22 1979-11-30 Akashi Seisakusho Kk Device for centering charged particle beam

Also Published As

Publication number Publication date
JPS5767912A (en) 1982-04-24

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