JPH0231789Y2 - - Google Patents

Info

Publication number
JPH0231789Y2
JPH0231789Y2 JP1989052075U JP5207589U JPH0231789Y2 JP H0231789 Y2 JPH0231789 Y2 JP H0231789Y2 JP 1989052075 U JP1989052075 U JP 1989052075U JP 5207589 U JP5207589 U JP 5207589U JP H0231789 Y2 JPH0231789 Y2 JP H0231789Y2
Authority
JP
Japan
Prior art keywords
lid
main body
wafer
plate
holding plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1989052075U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01163338U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989052075U priority Critical patent/JPH0231789Y2/ja
Publication of JPH01163338U publication Critical patent/JPH01163338U/ja
Application granted granted Critical
Publication of JPH0231789Y2 publication Critical patent/JPH0231789Y2/ja
Expired legal-status Critical Current

Links

JP1989052075U 1989-05-02 1989-05-02 Expired JPH0231789Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989052075U JPH0231789Y2 (en, 2012) 1989-05-02 1989-05-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989052075U JPH0231789Y2 (en, 2012) 1989-05-02 1989-05-02

Publications (2)

Publication Number Publication Date
JPH01163338U JPH01163338U (en, 2012) 1989-11-14
JPH0231789Y2 true JPH0231789Y2 (en, 2012) 1990-08-28

Family

ID=31278086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989052075U Expired JPH0231789Y2 (en, 2012) 1989-05-02 1989-05-02

Country Status (1)

Country Link
JP (1) JPH0231789Y2 (en, 2012)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931238U (ja) * 1982-08-24 1984-02-27 三菱マテリアル株式会社 半導体ウエハ−の収納容器

Also Published As

Publication number Publication date
JPH01163338U (en, 2012) 1989-11-14

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