JPH0230783Y2 - - Google Patents

Info

Publication number
JPH0230783Y2
JPH0230783Y2 JP1983147182U JP14718283U JPH0230783Y2 JP H0230783 Y2 JPH0230783 Y2 JP H0230783Y2 JP 1983147182 U JP1983147182 U JP 1983147182U JP 14718283 U JP14718283 U JP 14718283U JP H0230783 Y2 JPH0230783 Y2 JP H0230783Y2
Authority
JP
Japan
Prior art keywords
movable part
movable
electrode
coil
restoring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983147182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6054969U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14718283U priority Critical patent/JPS6054969U/ja
Publication of JPS6054969U publication Critical patent/JPS6054969U/ja
Application granted granted Critical
Publication of JPH0230783Y2 publication Critical patent/JPH0230783Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP14718283U 1983-09-22 1983-09-22 サ−ボ加速度計 Granted JPS6054969U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14718283U JPS6054969U (ja) 1983-09-22 1983-09-22 サ−ボ加速度計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14718283U JPS6054969U (ja) 1983-09-22 1983-09-22 サ−ボ加速度計

Publications (2)

Publication Number Publication Date
JPS6054969U JPS6054969U (ja) 1985-04-17
JPH0230783Y2 true JPH0230783Y2 (enrdf_load_stackoverflow) 1990-08-20

Family

ID=30327379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14718283U Granted JPS6054969U (ja) 1983-09-22 1983-09-22 サ−ボ加速度計

Country Status (1)

Country Link
JP (1) JPS6054969U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7997136B2 (en) * 2008-10-08 2011-08-16 Honeywell International Inc. MEMS force balance accelerometer

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5433735A (en) * 1977-08-05 1979-03-12 Shimadzu Corp Recording system
JPS5431892A (en) * 1977-08-12 1979-03-08 Seiko Instr & Electronics Ltd Pneumatic pulse servo actuator

Also Published As

Publication number Publication date
JPS6054969U (ja) 1985-04-17

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