JPS6054969U - サ−ボ加速度計 - Google Patents

サ−ボ加速度計

Info

Publication number
JPS6054969U
JPS6054969U JP14718283U JP14718283U JPS6054969U JP S6054969 U JPS6054969 U JP S6054969U JP 14718283 U JP14718283 U JP 14718283U JP 14718283 U JP14718283 U JP 14718283U JP S6054969 U JPS6054969 U JP S6054969U
Authority
JP
Japan
Prior art keywords
movable part
servo accelerometer
restoring coil
thin plate
force generated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14718283U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0230783Y2 (enrdf_load_stackoverflow
Inventor
原田　謹爾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP14718283U priority Critical patent/JPS6054969U/ja
Publication of JPS6054969U publication Critical patent/JPS6054969U/ja
Application granted granted Critical
Publication of JPH0230783Y2 publication Critical patent/JPH0230783Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP14718283U 1983-09-22 1983-09-22 サ−ボ加速度計 Granted JPS6054969U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14718283U JPS6054969U (ja) 1983-09-22 1983-09-22 サ−ボ加速度計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14718283U JPS6054969U (ja) 1983-09-22 1983-09-22 サ−ボ加速度計

Publications (2)

Publication Number Publication Date
JPS6054969U true JPS6054969U (ja) 1985-04-17
JPH0230783Y2 JPH0230783Y2 (enrdf_load_stackoverflow) 1990-08-20

Family

ID=30327379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14718283U Granted JPS6054969U (ja) 1983-09-22 1983-09-22 サ−ボ加速度計

Country Status (1)

Country Link
JP (1) JPS6054969U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010091565A (ja) * 2008-10-08 2010-04-22 Honeywell Internatl Inc 微小電気機械システム（ｍｅｍｓ）力平行加速度計

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5431892A (en) * 1977-08-12 1979-03-08 Seiko Instr & Electronics Ltd Pneumatic pulse servo actuator
JPS5433735A (en) * 1977-08-05 1979-03-12 Shimadzu Corp Recording system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5433735A (en) * 1977-08-05 1979-03-12 Shimadzu Corp Recording system
JPS5431892A (en) * 1977-08-12 1979-03-08 Seiko Instr & Electronics Ltd Pneumatic pulse servo actuator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010091565A (ja) * 2008-10-08 2010-04-22 Honeywell Internatl Inc 微小電気機械システム（ｍｅｍｓ）力平行加速度計

Also Published As

Publication number Publication date
JPH0230783Y2 (enrdf_load_stackoverflow) 1990-08-20

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