JPS6054969U - Servo accelerometer - Google Patents

Servo accelerometer

Info

Publication number
JPS6054969U
JPS6054969U JP14718283U JP14718283U JPS6054969U JP S6054969 U JPS6054969 U JP S6054969U JP 14718283 U JP14718283 U JP 14718283U JP 14718283 U JP14718283 U JP 14718283U JP S6054969 U JPS6054969 U JP S6054969U
Authority
JP
Japan
Prior art keywords
movable part
servo accelerometer
restoring coil
thin plate
force generated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14718283U
Other languages
Japanese (ja)
Other versions
JPH0230783Y2 (en
Inventor
原田 謹爾
Original Assignee
横河電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 横河電機株式会社 filed Critical 横河電機株式会社
Priority to JP14718283U priority Critical patent/JPS6054969U/en
Publication of JPS6054969U publication Critical patent/JPS6054969U/en
Application granted granted Critical
Publication of JPH0230783Y2 publication Critical patent/JPH0230783Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のサーボ加速度計の一例を示す構成図、第
2図は本考案の一実施例を示す要部の構成図、第3図は
全体の組立構成図を示す。 11・・・・・・固定電極、12・・・・・・可動部、
13・・・・・・支持枠、14・・・・・・可動電極、
15..15b、1     ′5c・・・・・・フレ
クシャ、19・・・・・・復元用コイル。
FIG. 1 is a block diagram showing an example of a conventional servo accelerometer, FIG. 2 is a block diagram of a main part of an embodiment of the present invention, and FIG. 3 is a diagram showing the overall assembled structure. 11...Fixed electrode, 12...Movable part,
13... Support frame, 14... Movable electrode,
15. .. 15b, 1'5c... Flexure, 19... Restoration coil.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 電磁力を発生する復元用コイルと一体に形成された可動
部の質量に対して測定すべき加速度が加わったときに生
ずる力を上記可動部の変位により検出して電気信号に変
換し、この電気信号を電流増幅して上記復元用コイレレ
に供線して発生する電磁力で上記力と平衡させる構成の
サーボ加速度計において、上記可動部を弾性を有する薄
板で形成すると共に上記復元用コイルを上記薄板上に平
面状に形成してなるサーボ加速度計。
The force generated when the acceleration to be measured is applied to the mass of the movable part, which is integrally formed with the restoring coil that generates the electromagnetic force, is detected by the displacement of the movable part and converted into an electrical signal. In a servo accelerometer configured to balance the force with the electromagnetic force generated by current amplifying the signal and connecting it to the restoring coil element, the movable part is formed of an elastic thin plate, and the restoring coil is connected to the restoring coil. A servo accelerometer formed flat on a thin plate.
JP14718283U 1983-09-22 1983-09-22 Servo accelerometer Granted JPS6054969U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14718283U JPS6054969U (en) 1983-09-22 1983-09-22 Servo accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14718283U JPS6054969U (en) 1983-09-22 1983-09-22 Servo accelerometer

Publications (2)

Publication Number Publication Date
JPS6054969U true JPS6054969U (en) 1985-04-17
JPH0230783Y2 JPH0230783Y2 (en) 1990-08-20

Family

ID=30327379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14718283U Granted JPS6054969U (en) 1983-09-22 1983-09-22 Servo accelerometer

Country Status (1)

Country Link
JP (1) JPS6054969U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010091565A (en) * 2008-10-08 2010-04-22 Honeywell Internatl Inc Micro electro-mechanical system (mems) force balance accelerometer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5431892A (en) * 1977-08-12 1979-03-08 Seiko Instr & Electronics Ltd Pneumatic pulse servo actuator
JPS5433735A (en) * 1977-08-05 1979-03-12 Shimadzu Corp Recording system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5433735A (en) * 1977-08-05 1979-03-12 Shimadzu Corp Recording system
JPS5431892A (en) * 1977-08-12 1979-03-08 Seiko Instr & Electronics Ltd Pneumatic pulse servo actuator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010091565A (en) * 2008-10-08 2010-04-22 Honeywell Internatl Inc Micro electro-mechanical system (mems) force balance accelerometer

Also Published As

Publication number Publication date
JPH0230783Y2 (en) 1990-08-20

Similar Documents

Publication Publication Date Title
JPS603533U (en) pressure response device
JPS6054969U (en) Servo accelerometer
JPS6267264U (en)
JPS5840853U (en) magnetoelectric conversion element
JPS60181675U (en) seismic sensor
JPS5888500U (en) Ultrasonic transducer
JPS58141837U (en) vibration detection device
JPS58176206U (en) Pickup Cartridge
JPS58145533U (en) pressure gauge
JPS6015666U (en) vibration acceleration detector
JPS6112231U (en) Differential actuator
JPS59180618U (en) Displacement sensor using semiconductor strain gauge
JPS6118632U (en) Holding structure of piezoelectric vibrating element
JPS6130137U (en) Weight detection type coordinate input device
JPS582844U (en) electromagnetic relay
JPS5960524U (en) Knock sensor
JPS60188316U (en) Altitude detection device
JPS6112015U (en) Sliding resistance type displacement-electrical conversion device for indicating instruments
JPS58116329U (en) Protection device for piezoelectric vibrator
JPS5859218U (en) Load cell amplifier
JPS60155632U (en) Power unit support device
JPS5937541U (en) barometer
JPS59931U (en) barometer
JPS6068800U (en) ultrasonic transducer
JPS58162058U (en) acceleration detector