JP5634697B2 - 微小電気機械システム(mems)力平行加速度計 - Google Patents
微小電気機械システム(mems)力平行加速度計 Download PDFInfo
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- JP5634697B2 JP5634697B2 JP2009232419A JP2009232419A JP5634697B2 JP 5634697 B2 JP5634697 B2 JP 5634697B2 JP 2009232419 A JP2009232419 A JP 2009232419A JP 2009232419 A JP2009232419 A JP 2009232419A JP 5634697 B2 JP5634697 B2 JP 5634697B2
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- Prior art keywords
- proof mass
- magnet
- accelerometer
- pole
- mems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
Description
本発明の他の側面によれば、第1磁石は環状形状を備える。
Claims (3)
- 微小電気機械システム(MEMS)加速度計(40)であって、
ハウジング(44)と、
少なくとも1つの屈曲部により前記ハウジング内に吊るされるプルーフマス(68)と、
前記プルーフマス上に位置する少なくとも1つの平面コイル(72)と、
少なくとも1つの磁石(50)と、
前記少なくとも1つの磁石の少なくとも1つに隣接する第1極部品(54)と、
第2極部品(52)と、を有し、
前記第1極部品の少なくとも1つの面が前記プルーフマスの第1側部に近接して位置決めされ、前記第2極部品の少なくとも1つの面が前記プルーフマスの第2側部に近接して位置決めされて、磁束場が、前記磁石から、前記第1極部品の前記面を通り、前記少なくとも1つの平面コイルの平面に対して約30°から約60°の間の磁束角度(73)で前記少なくとも1つの平面コイルを通り、前記第2極部品に入る、MEMS加速度計。
- 請求項1に記載のMEMS加速度計であって、前記少なくとも1つの磁石は、
前記第1極部品に隣接する第1磁石(50)と、
前記第2極部品に隣接する第2磁石(48)と、を有し、
前記第1磁石は環状形状を備える、MEMS加速度計。 - 請求項1に記載のMEMS加速度計であって、前記ハウジングは、前記プルーフマスの第1側部側に位置決めされる第1ハウジング層を有し、前記第1ハウジング層は第1凹部領域を画定し、前記プルーフマスの前記第1側部に近接して配置される前記第1極部品の前記少なくとも1つの面の少なくとも1つは、少なくとも部分的に前記第1凹部領域内に延び、前記ハウジングはさらに、前記プルーフマスの第2側部側に位置決めされる第2ハウジング層を有し、前記第2ハウジング層は第2凹部領域を画定し、前記プルーフマスの前記第2側部に近接して位置決めされる前記第2極部品の前記少なくとも1つの面の少なくとも1つは、少なくとも部分的に前記第2凹部領域内に延びる、MEMS加速度計。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/247,512 | 2008-10-08 | ||
US12/247,512 US7997136B2 (en) | 2008-10-08 | 2008-10-08 | MEMS force balance accelerometer |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010091565A JP2010091565A (ja) | 2010-04-22 |
JP5634697B2 true JP5634697B2 (ja) | 2014-12-03 |
Family
ID=41429323
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009232419A Expired - Fee Related JP5634697B2 (ja) | 2008-10-08 | 2009-10-06 | 微小電気機械システム(mems)力平行加速度計 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7997136B2 (ja) |
EP (1) | EP2175284B1 (ja) |
JP (1) | JP5634697B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8065915B2 (en) * | 2008-10-08 | 2011-11-29 | Honeywell International Inc. | MEMS accelerometer |
US8122767B2 (en) * | 2008-10-08 | 2012-02-28 | Honeywell International Inc. | D'arsonval movement mems accelerometer |
US8215169B2 (en) * | 2009-03-26 | 2012-07-10 | Honeywell International Inc. | Using pole pieces to guide magnetic flux through a MEMS device and method of making |
CN101893451B (zh) * | 2009-05-22 | 2013-08-21 | 鸿富锦精密工业(深圳)有限公司 | 电容式传感器及陀螺仪 |
US20140290365A1 (en) * | 2013-04-02 | 2014-10-02 | Tao Ju | Mems device |
CN102879077B (zh) * | 2012-09-18 | 2014-03-26 | 哈尔滨工程大学 | 一种同振式矢量水听器 |
US10161956B2 (en) * | 2016-04-25 | 2018-12-25 | Honeywell International Inc. | Reducing bias in an accelerometer via a pole piece |
US10816568B2 (en) | 2017-12-26 | 2020-10-27 | Physical Logic Ltd. | Closed loop accelerometer |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
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US4088027A (en) | 1976-09-29 | 1978-05-09 | Hernandez E Norman | Force balance servo accelerometer |
US4510802A (en) | 1983-09-02 | 1985-04-16 | Sundstrand Data Control, Inc. | Angular rate sensor utilizing two vibrating accelerometers secured to a parallelogram linkage |
JPS6054969U (ja) * | 1983-09-22 | 1985-04-17 | 横河電機株式会社 | サ−ボ加速度計 |
US4726228A (en) | 1986-04-16 | 1988-02-23 | Sundstrand Data Control, Inc. | Accelerometer proof mass interface |
US4854169A (en) | 1987-06-15 | 1989-08-08 | Japan Aviation Electronics Industry Ltd. | Accelerometer |
FR2637984B1 (fr) | 1988-10-19 | 1991-01-11 | Sagem | Accelerometre pendulaire asservi a detection electrostatique |
US4944184A (en) | 1989-04-14 | 1990-07-31 | Sundstrand Data Control, Inc. | Asymmetric flexure for pendulous accelerometer |
US5524488A (en) * | 1994-01-24 | 1996-06-11 | Alliedsignal Inc. | Flux control groove |
FR2734641B1 (fr) | 1995-05-24 | 1997-08-14 | Sextant Avionique | Accelerometre electromagnetique |
US5731703A (en) | 1995-10-31 | 1998-03-24 | The Charles Stark Draper Laboratory, Inc. | Micromechanical d'arsonval magnetometer |
JP3818399B2 (ja) * | 1996-03-12 | 2006-09-06 | 株式会社ミツトヨ | 超小型加速度センサ |
US5739431A (en) | 1996-06-13 | 1998-04-14 | Alliedsignal, Inc. | Miniature magnetometer-accelerometer |
JP2000028367A (ja) * | 1998-07-13 | 2000-01-28 | Wako:Kk | 角速度センサおよびこれを用いた角速度検出装置 |
RU2155964C1 (ru) | 1999-06-23 | 2000-09-10 | Коновалов Сергей Феодосьевич | Компенсационный маятниковый акселерометр |
JP2002350459A (ja) * | 2001-05-23 | 2002-12-04 | Akashi Corp | 振動センサ、及び振動センサの製造方法 |
US6664786B2 (en) | 2001-07-30 | 2003-12-16 | Rockwell Automation Technologies, Inc. | Magnetic field sensor using microelectromechanical system |
US6776042B2 (en) | 2002-01-25 | 2004-08-17 | Kinemetrics, Inc. | Micro-machined accelerometer |
US7346981B2 (en) | 2002-08-07 | 2008-03-25 | Teledyne Licensing, Llc | Method for fabricating microelectromechanical system (MEMS) devices |
US7191654B2 (en) * | 2005-08-17 | 2007-03-20 | Honeywell International Inc. | Methods and systems for adjusting magnetic return path with minimized reluctance |
US7303935B2 (en) | 2005-09-08 | 2007-12-04 | Teledyne Licensing, Llc | High temperature microelectromechanical (MEM) devices and fabrication method |
US7347097B2 (en) * | 2006-03-01 | 2008-03-25 | Innalabs Technologies, Inc. | Servo compensating accelerometer |
US8065915B2 (en) * | 2008-10-08 | 2011-11-29 | Honeywell International Inc. | MEMS accelerometer |
-
2008
- 2008-10-08 US US12/247,512 patent/US7997136B2/en active Active
-
2009
- 2009-10-01 EP EP09172009.4A patent/EP2175284B1/en not_active Not-in-force
- 2009-10-06 JP JP2009232419A patent/JP5634697B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP2175284A1 (en) | 2010-04-14 |
EP2175284B1 (en) | 2015-01-14 |
US7997136B2 (en) | 2011-08-16 |
JP2010091565A (ja) | 2010-04-22 |
US20100083759A1 (en) | 2010-04-08 |
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