JP5933510B2 - Mems加速度計 - Google Patents
Mems加速度計 Download PDFInfo
- Publication number
- JP5933510B2 JP5933510B2 JP2013239546A JP2013239546A JP5933510B2 JP 5933510 B2 JP5933510 B2 JP 5933510B2 JP 2013239546 A JP2013239546 A JP 2013239546A JP 2013239546 A JP2013239546 A JP 2013239546A JP 5933510 B2 JP5933510 B2 JP 5933510B2
- Authority
- JP
- Japan
- Prior art keywords
- coil
- proof mass
- accelerometer
- magnet
- mems
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
- Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
本発明のさらなる側面によれば、少なくとも1つの磁石は、プルーフマスの第1の側部上に位置決めされる第1環状磁石、および、プルーフマスの第2の側面上に位置決めされる第2環状磁石を含む。この第2環状磁石は、第1環状磁石の内側直径よりも小さな内側直径を備え、また、第1環状磁石の外側直径よりも小さい外側直径を備える。
Claims (3)
- 微小電気機械システム(MEMS)加速度計(40)であって、
ヒンジタイプの屈曲部により吊るされるプルーフマス(42)と、
前記プルーフマス上に位置する、少なくとも1つの平面コイル(46、48)と、
前記コイルの平面に対して約30°から約60°の間の範囲の磁束角度で、磁束場が前記少なくとも1つのコイルを通るように位置決めされる少なくとも1つの磁石(50、52)と、を有する、MEMS加速度計。 - 請求項1に記載のMEMS加速度計であって、前記少なくとも1つの磁石は、
前記プルーフマスの第1側部側に位置決めされる第1環状磁石(50)と、
前記プルーフマスの第2側部側に位置決めされる第2環状磁石(52)と、を有し、
前記第2環状磁石は、前記第1環状磁石の内側直径よりも小さな内側直径、および、前記第1環状磁石の外側直径よりも小さな外側直径を有する、MEMS加速度計。 - 請求項1に記載のMEMS加速度計であって、さらに、前記少なくとも1つの磁石に連結される磁気戻り経路構造(41)を有し、磁気戻り経路構造は、前記プルーフマスの第1側部から前記プルーフマスの第2側部まで延びる、MEMS加速度計。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/247,921 US8065915B2 (en) | 2008-10-08 | 2008-10-08 | MEMS accelerometer |
US12/247,921 | 2008-10-08 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009232409A Division JP5425583B2 (ja) | 2008-10-08 | 2009-10-06 | Mems加速度計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014055976A JP2014055976A (ja) | 2014-03-27 |
JP5933510B2 true JP5933510B2 (ja) | 2016-06-08 |
Family
ID=41601907
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009232409A Expired - Fee Related JP5425583B2 (ja) | 2008-10-08 | 2009-10-06 | Mems加速度計 |
JP2013239546A Expired - Fee Related JP5933510B2 (ja) | 2008-10-08 | 2013-11-20 | Mems加速度計 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009232409A Expired - Fee Related JP5425583B2 (ja) | 2008-10-08 | 2009-10-06 | Mems加速度計 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8065915B2 (ja) |
EP (1) | EP2175283B1 (ja) |
JP (2) | JP5425583B2 (ja) |
AT (1) | ATE487949T1 (ja) |
DE (1) | DE602009000349D1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8122767B2 (en) * | 2008-10-08 | 2012-02-28 | Honeywell International Inc. | D'arsonval movement mems accelerometer |
US7997136B2 (en) * | 2008-10-08 | 2011-08-16 | Honeywell International Inc. | MEMS force balance accelerometer |
US8065915B2 (en) * | 2008-10-08 | 2011-11-29 | Honeywell International Inc. | MEMS accelerometer |
US8307710B2 (en) * | 2009-07-09 | 2012-11-13 | Honeywell International Inc. | Translational mass in-plane MEMS accelerometer |
CN101830427B (zh) * | 2010-04-17 | 2012-02-22 | 上海交通大学 | 基于mems技术的抗磁粒子三维操纵装置 |
US8552829B2 (en) * | 2010-11-19 | 2013-10-08 | Infineon Technologies Austria Ag | Transformer device and method for manufacturing a transformer device |
US10145906B2 (en) * | 2015-12-17 | 2018-12-04 | Analog Devices Global | Devices, systems and methods including magnetic structures |
US10161956B2 (en) * | 2016-04-25 | 2018-12-25 | Honeywell International Inc. | Reducing bias in an accelerometer via a pole piece |
CN107857231B (zh) * | 2017-10-24 | 2019-06-11 | 华中科技大学 | 一种微机电加速度计及其制备方法 |
JP7146499B2 (ja) * | 2018-07-17 | 2022-10-04 | 東京計器株式会社 | 3次元構造部材の製造方法、加速度ピックアップ部材の製造方法、加速度ピックアップ部材、及び加速度センサ |
US11187717B2 (en) | 2018-10-16 | 2021-11-30 | Ruben Flores | Radio frequency accelerometer |
US11275098B2 (en) * | 2020-07-14 | 2022-03-15 | Honeywell International Inc. | Accelerometer including rectangular coil and rectangular pole piece |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
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US3965753A (en) * | 1970-06-01 | 1976-06-29 | Browning Jr Alva Laroy | Electrostatic accelerometer and/or gyroscope radioisotope field support device |
US4088027A (en) | 1976-09-29 | 1978-05-09 | Hernandez E Norman | Force balance servo accelerometer |
US4144765A (en) * | 1977-09-21 | 1979-03-20 | Honeywell Inc. | Linear accelerometer with torsion hinge suspension |
US4510802A (en) | 1983-09-02 | 1985-04-16 | Sundstrand Data Control, Inc. | Angular rate sensor utilizing two vibrating accelerometers secured to a parallelogram linkage |
US4868479A (en) * | 1985-10-15 | 1989-09-19 | The Charles Stark Draper Laboratory, Inc. | Low loss permanent magnet motor |
US4726228A (en) | 1986-04-16 | 1988-02-23 | Sundstrand Data Control, Inc. | Accelerometer proof mass interface |
US4854169A (en) | 1987-06-15 | 1989-08-08 | Japan Aviation Electronics Industry Ltd. | Accelerometer |
US5133214A (en) * | 1990-05-18 | 1992-07-28 | New Sd, Inc. | Adjustment of scale factor linearity in a servo accelerometer |
DE4036224A1 (de) * | 1990-11-14 | 1992-05-21 | Bosch Gmbh Robert | Sensor |
JPH0743377A (ja) * | 1993-07-29 | 1995-02-14 | Tokimec Inc | 加速度計 |
US5524488A (en) * | 1994-01-24 | 1996-06-11 | Alliedsignal Inc. | Flux control groove |
WO1996019733A1 (fr) | 1994-12-20 | 1996-06-27 | The Nippon Signal Co., Ltd. | Capteur d'acceleration |
IL123057A (en) | 1995-08-15 | 2001-06-14 | Allied Signal Inc | accelerometer |
US5731703A (en) | 1995-10-31 | 1998-03-24 | The Charles Stark Draper Laboratory, Inc. | Micromechanical d'arsonval magnetometer |
JP3818399B2 (ja) * | 1996-03-12 | 2006-09-06 | 株式会社ミツトヨ | 超小型加速度センサ |
US5739431A (en) | 1996-06-13 | 1998-04-14 | Alliedsignal, Inc. | Miniature magnetometer-accelerometer |
WO1998031572A1 (en) | 1997-01-17 | 1998-07-23 | Automotive Systems Laboratory, Inc. | Vehicle door edge movement sensor system |
JPH10335675A (ja) * | 1997-05-30 | 1998-12-18 | Aisin Seiki Co Ltd | 半導体マイクロマシン |
GB0000619D0 (en) * | 2000-01-13 | 2000-03-01 | British Aerospace | Accelerometer |
JP2002350459A (ja) * | 2001-05-23 | 2002-12-04 | Akashi Corp | 振動センサ、及び振動センサの製造方法 |
US6664786B2 (en) | 2001-07-30 | 2003-12-16 | Rockwell Automation Technologies, Inc. | Magnetic field sensor using microelectromechanical system |
US7036374B2 (en) | 2002-01-25 | 2006-05-02 | William Thomas Pike | Micro-machined suspension plate with integral proof mass for use in a seismometer or other device |
US6776042B2 (en) | 2002-01-25 | 2004-08-17 | Kinemetrics, Inc. | Micro-machined accelerometer |
US7346981B2 (en) | 2002-08-07 | 2008-03-25 | Teledyne Licensing, Llc | Method for fabricating microelectromechanical system (MEMS) devices |
US7191654B2 (en) * | 2005-08-17 | 2007-03-20 | Honeywell International Inc. | Methods and systems for adjusting magnetic return path with minimized reluctance |
US7303935B2 (en) | 2005-09-08 | 2007-12-04 | Teledyne Licensing, Llc | High temperature microelectromechanical (MEM) devices and fabrication method |
US7997136B2 (en) * | 2008-10-08 | 2011-08-16 | Honeywell International Inc. | MEMS force balance accelerometer |
US8065915B2 (en) * | 2008-10-08 | 2011-11-29 | Honeywell International Inc. | MEMS accelerometer |
-
2008
- 2008-10-08 US US12/247,921 patent/US8065915B2/en active Active
-
2009
- 2009-10-01 AT AT09171988T patent/ATE487949T1/de not_active IP Right Cessation
- 2009-10-01 DE DE602009000349T patent/DE602009000349D1/de active Active
- 2009-10-01 EP EP09171988A patent/EP2175283B1/en not_active Not-in-force
- 2009-10-06 JP JP2009232409A patent/JP5425583B2/ja not_active Expired - Fee Related
-
2013
- 2013-11-20 JP JP2013239546A patent/JP5933510B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2010091564A (ja) | 2010-04-22 |
JP2014055976A (ja) | 2014-03-27 |
US8065915B2 (en) | 2011-11-29 |
DE602009000349D1 (de) | 2010-12-23 |
EP2175283B1 (en) | 2010-11-10 |
ATE487949T1 (de) | 2010-11-15 |
JP5425583B2 (ja) | 2014-02-26 |
EP2175283A1 (en) | 2010-04-14 |
US20100083760A1 (en) | 2010-04-08 |
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