JP2010091564A - Mems加速度計 - Google Patents
Mems加速度計 Download PDFInfo
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- JP2010091564A JP2010091564A JP2009232409A JP2009232409A JP2010091564A JP 2010091564 A JP2010091564 A JP 2010091564A JP 2009232409 A JP2009232409 A JP 2009232409A JP 2009232409 A JP2009232409 A JP 2009232409A JP 2010091564 A JP2010091564 A JP 2010091564A
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- Prior art keywords
- proof mass
- coil
- accelerometer
- magnet
- mems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
Abstract
【解決手段】ヒンジタイプの屈曲部44により吊るされるプルーフマス42と、プルーフマス42上に位置する平面コイル46、48と、コイルの平面に対して約30°から約60°の間の範囲の磁束角度で、磁束場がコイルを通るように位置決めされる磁石50,52とを有する。例示的な一実施形態において、この角度は45度である。磁石は、プルーフマス42の第1側部側に位置する第1環状磁石50と、プルーフマス42の第2側部側に位置する第2環状磁石52とを備える。MEMS加速度計のピックオフのキャパシタンスを検出し、平面コイル46、48に電流を伝達することによりMEMS加速度計を再平衡させる。
【選択図】図2
Description
本発明のさらなる側面によれば、少なくとも1つの磁石は、プルーフマスの第1の側部上に位置決めされる第1環状磁石、および、プルーフマスの第2の側面上に位置決めされる第2環状磁石を含む。この第2環状磁石は、第1環状磁石の内側直径よりも小さな内側直径を備え、また、第1環状磁石の外側直径よりも小さい外側直径を備える。
Claims (3)
- 微小電気機械システム(MEMS)加速度計(40)であって、
ヒンジタイプの屈曲部により吊るされるプルーフマス(42)と、
前記プルーフマス上に位置する、少なくとも1つの平面コイル(46、48)と、
前記コイルの平面に対して約30°から約60°の間の範囲の磁束角度で、磁束場が前記少なくとも1つのコイルを通るように位置決めされる少なくとも1つの磁石(50、52)と、を有し、
前記角度は約40°と約50°との間の角度である、MEMS加速度計。 - 請求項1に記載のMEMS加速度計であって、前記少なくとも1つの磁石は、
前記プルーフマスの第1側部側に位置決めされる第1環状磁石(50)と、
前記プルーフマスの第2側部側に位置決めされる第2環状磁石(52)と、を有し、
前記第2環状磁石は、前記第1環状磁石の内側直径よりも小さな内側直径、および、前記第1環状磁石の外側直径よりも小さな外側直径を有する、MEMS加速度計。 - 請求項1に記載のMEMS加速度計であって、さらに、前記少なくとも1つの磁石に連結される磁気戻り経路構造(41)を有し、磁気戻り経路構造は、前記プルーフマスの第1側部から前記プルーフマスの第2側部まで延びる、MEMS加速度計。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/247,921 US8065915B2 (en) | 2008-10-08 | 2008-10-08 | MEMS accelerometer |
US12/247,921 | 2008-10-08 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013239546A Division JP5933510B2 (ja) | 2008-10-08 | 2013-11-20 | Mems加速度計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010091564A true JP2010091564A (ja) | 2010-04-22 |
JP5425583B2 JP5425583B2 (ja) | 2014-02-26 |
Family
ID=41601907
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009232409A Expired - Fee Related JP5425583B2 (ja) | 2008-10-08 | 2009-10-06 | Mems加速度計 |
JP2013239546A Expired - Fee Related JP5933510B2 (ja) | 2008-10-08 | 2013-11-20 | Mems加速度計 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013239546A Expired - Fee Related JP5933510B2 (ja) | 2008-10-08 | 2013-11-20 | Mems加速度計 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8065915B2 (ja) |
EP (1) | EP2175283B1 (ja) |
JP (2) | JP5425583B2 (ja) |
AT (1) | ATE487949T1 (ja) |
DE (1) | DE602009000349D1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020017498A1 (ja) * | 2018-07-17 | 2020-01-23 | 東京計器株式会社 | 3次元構造部材の製造方法、加速度ピックアップ部材の製造方法、加速度ピックアップ部材、及び加速度センサ |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8065915B2 (en) * | 2008-10-08 | 2011-11-29 | Honeywell International Inc. | MEMS accelerometer |
US7997136B2 (en) * | 2008-10-08 | 2011-08-16 | Honeywell International Inc. | MEMS force balance accelerometer |
US8122767B2 (en) * | 2008-10-08 | 2012-02-28 | Honeywell International Inc. | D'arsonval movement mems accelerometer |
US8307710B2 (en) * | 2009-07-09 | 2012-11-13 | Honeywell International Inc. | Translational mass in-plane MEMS accelerometer |
CN101830427B (zh) * | 2010-04-17 | 2012-02-22 | 上海交通大学 | 基于mems技术的抗磁粒子三维操纵装置 |
US8552829B2 (en) * | 2010-11-19 | 2013-10-08 | Infineon Technologies Austria Ag | Transformer device and method for manufacturing a transformer device |
US10145906B2 (en) | 2015-12-17 | 2018-12-04 | Analog Devices Global | Devices, systems and methods including magnetic structures |
US10161956B2 (en) * | 2016-04-25 | 2018-12-25 | Honeywell International Inc. | Reducing bias in an accelerometer via a pole piece |
CN107857231B (zh) * | 2017-10-24 | 2019-06-11 | 华中科技大学 | 一种微机电加速度计及其制备方法 |
US11187717B2 (en) | 2018-10-16 | 2021-11-30 | Ruben Flores | Radio frequency accelerometer |
US11275098B2 (en) | 2020-07-14 | 2022-03-15 | Honeywell International Inc. | Accelerometer including rectangular coil and rectangular pole piece |
Citations (5)
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JPH0743377A (ja) * | 1993-07-29 | 1995-02-14 | Tokimec Inc | 加速度計 |
JPH09243658A (ja) * | 1996-03-12 | 1997-09-19 | Akashi:Kk | 超小型加速度センサ |
JPH10335675A (ja) * | 1997-05-30 | 1998-12-18 | Aisin Seiki Co Ltd | 半導体マイクロマシン |
JP2002350459A (ja) * | 2001-05-23 | 2002-12-04 | Akashi Corp | 振動センサ、及び振動センサの製造方法 |
JP2003519797A (ja) * | 2000-01-13 | 2003-06-24 | ビ−エイイ− システムズ パブリック リミテッド カンパニ− | 加速度計 |
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-
2008
- 2008-10-08 US US12/247,921 patent/US8065915B2/en active Active
-
2009
- 2009-10-01 AT AT09171988T patent/ATE487949T1/de not_active IP Right Cessation
- 2009-10-01 EP EP09171988A patent/EP2175283B1/en not_active Not-in-force
- 2009-10-01 DE DE602009000349T patent/DE602009000349D1/de active Active
- 2009-10-06 JP JP2009232409A patent/JP5425583B2/ja not_active Expired - Fee Related
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2013
- 2013-11-20 JP JP2013239546A patent/JP5933510B2/ja not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0743377A (ja) * | 1993-07-29 | 1995-02-14 | Tokimec Inc | 加速度計 |
JPH09243658A (ja) * | 1996-03-12 | 1997-09-19 | Akashi:Kk | 超小型加速度センサ |
JPH10335675A (ja) * | 1997-05-30 | 1998-12-18 | Aisin Seiki Co Ltd | 半導体マイクロマシン |
JP2003519797A (ja) * | 2000-01-13 | 2003-06-24 | ビ−エイイ− システムズ パブリック リミテッド カンパニ− | 加速度計 |
JP2002350459A (ja) * | 2001-05-23 | 2002-12-04 | Akashi Corp | 振動センサ、及び振動センサの製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020017498A1 (ja) * | 2018-07-17 | 2020-01-23 | 東京計器株式会社 | 3次元構造部材の製造方法、加速度ピックアップ部材の製造方法、加速度ピックアップ部材、及び加速度センサ |
US11584641B2 (en) | 2018-07-17 | 2023-02-21 | TOKYO KEIKl INC. | Method for manufacturing three-dimensionally structured member, method for manufacturing acceleration pickup, acceleration pickup, and acceleration sensor |
Also Published As
Publication number | Publication date |
---|---|
US20100083760A1 (en) | 2010-04-08 |
US8065915B2 (en) | 2011-11-29 |
ATE487949T1 (de) | 2010-11-15 |
EP2175283A1 (en) | 2010-04-14 |
EP2175283B1 (en) | 2010-11-10 |
JP2014055976A (ja) | 2014-03-27 |
JP5933510B2 (ja) | 2016-06-08 |
DE602009000349D1 (de) | 2010-12-23 |
JP5425583B2 (ja) | 2014-02-26 |
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