JPH0230444Y2 - - Google Patents

Info

Publication number
JPH0230444Y2
JPH0230444Y2 JP1985147334U JP14733485U JPH0230444Y2 JP H0230444 Y2 JPH0230444 Y2 JP H0230444Y2 JP 1985147334 U JP1985147334 U JP 1985147334U JP 14733485 U JP14733485 U JP 14733485U JP H0230444 Y2 JPH0230444 Y2 JP H0230444Y2
Authority
JP
Japan
Prior art keywords
film
chamber
sputtering
unwinding
roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985147334U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6255559U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985147334U priority Critical patent/JPH0230444Y2/ja
Publication of JPS6255559U publication Critical patent/JPS6255559U/ja
Application granted granted Critical
Publication of JPH0230444Y2 publication Critical patent/JPH0230444Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1985147334U 1985-09-28 1985-09-28 Expired JPH0230444Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985147334U JPH0230444Y2 (enrdf_load_stackoverflow) 1985-09-28 1985-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985147334U JPH0230444Y2 (enrdf_load_stackoverflow) 1985-09-28 1985-09-28

Publications (2)

Publication Number Publication Date
JPS6255559U JPS6255559U (enrdf_load_stackoverflow) 1987-04-06
JPH0230444Y2 true JPH0230444Y2 (enrdf_load_stackoverflow) 1990-08-16

Family

ID=31060599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985147334U Expired JPH0230444Y2 (enrdf_load_stackoverflow) 1985-09-28 1985-09-28

Country Status (1)

Country Link
JP (1) JPH0230444Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013141782A (ja) * 2012-01-11 2013-07-22 Kuraray Fastening Co Ltd 面ファスナーを有する積層体及びその製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009013473A (ja) * 2007-07-05 2009-01-22 Dainippon Printing Co Ltd 薄膜形成装置および薄膜形成方法
JP5471508B2 (ja) * 2010-01-26 2014-04-16 富士電機株式会社 可撓性基板の処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173267A (ja) * 1983-03-23 1984-10-01 Fuji Photo Film Co Ltd 薄膜形成装置
JPS59173266A (ja) * 1983-03-23 1984-10-01 Fuji Photo Film Co Ltd 薄膜形成装置
JPS6067671A (ja) * 1983-09-24 1985-04-18 Anelva Corp 薄膜作成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013141782A (ja) * 2012-01-11 2013-07-22 Kuraray Fastening Co Ltd 面ファスナーを有する積層体及びその製造方法

Also Published As

Publication number Publication date
JPS6255559U (enrdf_load_stackoverflow) 1987-04-06

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