JPH0230175B2 - - Google Patents

Info

Publication number
JPH0230175B2
JPH0230175B2 JP59072253A JP7225384A JPH0230175B2 JP H0230175 B2 JPH0230175 B2 JP H0230175B2 JP 59072253 A JP59072253 A JP 59072253A JP 7225384 A JP7225384 A JP 7225384A JP H0230175 B2 JPH0230175 B2 JP H0230175B2
Authority
JP
Japan
Prior art keywords
resist
pattern
film
layer
resist layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59072253A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60214532A (ja
Inventor
Hideo Akitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP59072253A priority Critical patent/JPS60214532A/ja
Priority to US06/721,305 priority patent/US4599137A/en
Publication of JPS60214532A publication Critical patent/JPS60214532A/ja
Publication of JPH0230175B2 publication Critical patent/JPH0230175B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
    • H10P50/287—
    • H10P76/20—
    • H10P76/202—

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Drying Of Semiconductors (AREA)
JP59072253A 1984-04-11 1984-04-11 パタ−ン形成方法 Granted JPS60214532A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP59072253A JPS60214532A (ja) 1984-04-11 1984-04-11 パタ−ン形成方法
US06/721,305 US4599137A (en) 1984-04-11 1985-04-09 Method of forming resist pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59072253A JPS60214532A (ja) 1984-04-11 1984-04-11 パタ−ン形成方法

Publications (2)

Publication Number Publication Date
JPS60214532A JPS60214532A (ja) 1985-10-26
JPH0230175B2 true JPH0230175B2 (enExample) 1990-07-04

Family

ID=13483942

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59072253A Granted JPS60214532A (ja) 1984-04-11 1984-04-11 パタ−ン形成方法

Country Status (2)

Country Link
US (1) US4599137A (enExample)
JP (1) JPS60214532A (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4642162A (en) * 1986-01-02 1987-02-10 Honeywell Inc. Planarization of dielectric layers in integrated circuits
US4711822A (en) * 1986-01-15 1987-12-08 Westinghouse Electric Corp. Metal core printed circuit boards
US4657629A (en) * 1986-03-27 1987-04-14 Harris Corporation Bilevel resist process
JPH0752772B2 (ja) * 1986-11-22 1995-06-05 ヤマハ株式会社 半導体装置の製法
US5139922A (en) * 1987-04-10 1992-08-18 Matsushita Electronics Corporation Method of making resist pattern
JPH07113774B2 (ja) * 1987-05-29 1995-12-06 株式会社日立製作所 パタ−ンの形成方法
JPS6450425A (en) * 1987-08-20 1989-02-27 Toshiba Corp Formation of fine pattern
JPH01118126A (ja) * 1987-10-31 1989-05-10 Fujitsu Ltd パターン形成方法
US4820376A (en) * 1987-11-05 1989-04-11 American Telephone And Telegraph Company At&T Bell Laboratories Fabrication of CPI layers
JP2606900B2 (ja) * 1988-09-08 1997-05-07 株式会社東芝 パターン形成方法
US5202286A (en) * 1989-02-27 1993-04-13 Mitsubishi Denki Kabushiki Kaisha Method of forming three-dimensional features on substrates with adjacent insulating films
JPH03138938A (ja) * 1989-10-24 1991-06-13 Toshiba Corp 半導体装置の製造方法
US5212117A (en) * 1989-10-24 1993-05-18 Kabushiki Kaisha Toshiba Method of manufacturing a semiconductor device contact structure using lift
EP0504614B1 (en) * 1991-02-22 2003-10-15 Canon Kabushiki Kaisha Electrical connecting member and manufacturing method therefor
KR0141941B1 (ko) * 1994-11-11 1998-07-15 문정환 감광막의 패터닝방법
EP1489460A3 (en) * 2003-06-20 2008-07-09 FUJIFILM Corporation Light-sensitive sheet comprising support, first light-sensitive layer and second light-sensitive layer
DE102004032677B4 (de) * 2004-07-02 2008-07-10 Qimonda Ag Verfahren zum Herstellen einer Maske auf einem Substrat
KR101243646B1 (ko) * 2004-09-21 2013-03-25 몰레큘러 임프린츠 인코퍼레이티드 인-시츄 홈 구조 형성 방법
JP5067848B2 (ja) * 2007-07-31 2012-11-07 キヤノン株式会社 パターンの形成方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4244799A (en) * 1978-09-11 1981-01-13 Bell Telephone Laboratories, Incorporated Fabrication of integrated circuits utilizing thick high-resolution patterns
US4389281A (en) * 1980-12-16 1983-06-21 International Business Machines Corporation Method of planarizing silicon dioxide in semiconductor devices
JPS59155933A (ja) * 1983-02-25 1984-09-05 Mitsubishi Electric Corp 微細パタ−ン形成方法
US4481049A (en) * 1984-03-02 1984-11-06 At&T Bell Laboratories Bilevel resist

Also Published As

Publication number Publication date
US4599137A (en) 1986-07-08
JPS60214532A (ja) 1985-10-26

Similar Documents

Publication Publication Date Title
JPH0230175B2 (enExample)
US6383952B1 (en) RELACS process to double the frequency or pitch of small feature formation
JPS6323657B2 (enExample)
JPH05299336A (ja) レジストパターン形成方法
JP2010503993A (ja) リフトオフ・パターニング向けの向上したエッチング技法
JPH0210362A (ja) 微細パターン形成方法
US5064748A (en) Method for anisotropically hardening a protective coating for integrated circuit manufacture
JP4967630B2 (ja) インプリントモールドおよびインプリントモールド製造方法
JPH02156244A (ja) パターン形成方法
JPS59124133A (ja) ネガテイブ型レジスト像の形成方法
KR100258803B1 (ko) 반도체 소자의 미세 패턴 형성방법
JPH0737782A (ja) 有機薄膜の製造方法
JP2633264B2 (ja) パターン形成方法
JPH05315241A (ja) レジストパターン形成方法
JPS61121332A (ja) パタ−ン形成方法
JPS60182093A (ja) 磁気バブルメモリ素子の製造方法
JPH0821574B2 (ja) パタ−ン形成方法
JP2713061B2 (ja) レジストパターンの形成方法
JPH04301852A (ja) パターン形成方法
JPH03268427A (ja) 有機樹脂膜のパターン形成方法及び多層配線基板の製造方法
JPH06112119A (ja) レジストパターン形成方法
JPS6333746A (ja) フオトマスクの製造方法
JPS6152567B2 (enExample)
JPH0513325A (ja) パターン形成方法
JP2000124097A (ja) パターン形成方法