JPH0227488Y2 - - Google Patents

Info

Publication number
JPH0227488Y2
JPH0227488Y2 JP1982163995U JP16399582U JPH0227488Y2 JP H0227488 Y2 JPH0227488 Y2 JP H0227488Y2 JP 1982163995 U JP1982163995 U JP 1982163995U JP 16399582 U JP16399582 U JP 16399582U JP H0227488 Y2 JPH0227488 Y2 JP H0227488Y2
Authority
JP
Japan
Prior art keywords
sample
axis
rotation
moving
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982163995U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5967850U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16399582U priority Critical patent/JPS5967850U/ja
Publication of JPS5967850U publication Critical patent/JPS5967850U/ja
Application granted granted Critical
Publication of JPH0227488Y2 publication Critical patent/JPH0227488Y2/ja
Granted legal-status Critical Current

Links

JP16399582U 1982-10-29 1982-10-29 試料移動装置 Granted JPS5967850U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16399582U JPS5967850U (ja) 1982-10-29 1982-10-29 試料移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16399582U JPS5967850U (ja) 1982-10-29 1982-10-29 試料移動装置

Publications (2)

Publication Number Publication Date
JPS5967850U JPS5967850U (ja) 1984-05-08
JPH0227488Y2 true JPH0227488Y2 (enrdf_load_stackoverflow) 1990-07-25

Family

ID=30359663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16399582U Granted JPS5967850U (ja) 1982-10-29 1982-10-29 試料移動装置

Country Status (1)

Country Link
JP (1) JPS5967850U (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109471A (en) * 1977-03-07 1978-09-25 Hitachi Ltd Test piece fine adjuster
JPS5413765A (en) * 1977-07-04 1979-02-01 Jeol Ltd Sample slanting equipment of scanning electron microscope or the like

Also Published As

Publication number Publication date
JPS5967850U (ja) 1984-05-08

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