JPS6336925Y2 - - Google Patents
Info
- Publication number
- JPS6336925Y2 JPS6336925Y2 JP14809382U JP14809382U JPS6336925Y2 JP S6336925 Y2 JPS6336925 Y2 JP S6336925Y2 JP 14809382 U JP14809382 U JP 14809382U JP 14809382 U JP14809382 U JP 14809382U JP S6336925 Y2 JPS6336925 Y2 JP S6336925Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- substrate
- optical axis
- small
- tilting body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 14
- 230000033001 locomotion Effects 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000026058 directional locomotion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14809382U JPS5952552U (ja) | 1982-09-30 | 1982-09-30 | 走査電子顕微鏡等における試料装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14809382U JPS5952552U (ja) | 1982-09-30 | 1982-09-30 | 走査電子顕微鏡等における試料装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5952552U JPS5952552U (ja) | 1984-04-06 |
| JPS6336925Y2 true JPS6336925Y2 (enrdf_load_stackoverflow) | 1988-09-29 |
Family
ID=30329131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14809382U Granted JPS5952552U (ja) | 1982-09-30 | 1982-09-30 | 走査電子顕微鏡等における試料装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5952552U (enrdf_load_stackoverflow) |
-
1982
- 1982-09-30 JP JP14809382U patent/JPS5952552U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5952552U (ja) | 1984-04-06 |
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