JPS5952552U - 走査電子顕微鏡等における試料装置 - Google Patents

走査電子顕微鏡等における試料装置

Info

Publication number
JPS5952552U
JPS5952552U JP14809382U JP14809382U JPS5952552U JP S5952552 U JPS5952552 U JP S5952552U JP 14809382 U JP14809382 U JP 14809382U JP 14809382 U JP14809382 U JP 14809382U JP S5952552 U JPS5952552 U JP S5952552U
Authority
JP
Japan
Prior art keywords
sample
scanning electron
tilting body
optical axis
sample stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14809382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6336925Y2 (enrdf_load_stackoverflow
Inventor
小田島　俊一
Original Assignee
株式会社日電子テクニクス
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日電子テクニクス filed Critical 株式会社日電子テクニクス
Priority to JP14809382U priority Critical patent/JPS5952552U/ja
Publication of JPS5952552U publication Critical patent/JPS5952552U/ja
Application granted granted Critical
Publication of JPS6336925Y2 publication Critical patent/JPS6336925Y2/ja
Granted legal-status Critical Current

Links

JP14809382U 1982-09-30 1982-09-30 走査電子顕微鏡等における試料装置 Granted JPS5952552U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14809382U JPS5952552U (ja) 1982-09-30 1982-09-30 走査電子顕微鏡等における試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14809382U JPS5952552U (ja) 1982-09-30 1982-09-30 走査電子顕微鏡等における試料装置

Publications (2)

Publication Number Publication Date
JPS5952552U true JPS5952552U (ja) 1984-04-06
JPS6336925Y2 JPS6336925Y2 (enrdf_load_stackoverflow) 1988-09-29

Family

ID=30329131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14809382U Granted JPS5952552U (ja) 1982-09-30 1982-09-30 走査電子顕微鏡等における試料装置

Country Status (1)

Country Link
JP (1) JPS5952552U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6336925Y2 (enrdf_load_stackoverflow) 1988-09-29

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