JPS5967850U - 試料移動装置 - Google Patents

試料移動装置

Info

Publication number
JPS5967850U
JPS5967850U JP16399582U JP16399582U JPS5967850U JP S5967850 U JPS5967850 U JP S5967850U JP 16399582 U JP16399582 U JP 16399582U JP 16399582 U JP16399582 U JP 16399582U JP S5967850 U JPS5967850 U JP S5967850U
Authority
JP
Japan
Prior art keywords
sample
moving device
sample moving
optical axis
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16399582U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0227488Y2 (enrdf_load_stackoverflow
Inventor
倉田　次男
Original Assignee
株式会社エービーティ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社エービーティ filed Critical 株式会社エービーティ
Priority to JP16399582U priority Critical patent/JPS5967850U/ja
Publication of JPS5967850U publication Critical patent/JPS5967850U/ja
Application granted granted Critical
Publication of JPH0227488Y2 publication Critical patent/JPH0227488Y2/ja
Granted legal-status Critical Current

Links

JP16399582U 1982-10-29 1982-10-29 試料移動装置 Granted JPS5967850U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16399582U JPS5967850U (ja) 1982-10-29 1982-10-29 試料移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16399582U JPS5967850U (ja) 1982-10-29 1982-10-29 試料移動装置

Publications (2)

Publication Number Publication Date
JPS5967850U true JPS5967850U (ja) 1984-05-08
JPH0227488Y2 JPH0227488Y2 (enrdf_load_stackoverflow) 1990-07-25

Family

ID=30359663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16399582U Granted JPS5967850U (ja) 1982-10-29 1982-10-29 試料移動装置

Country Status (1)

Country Link
JP (1) JPS5967850U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109471A (en) * 1977-03-07 1978-09-25 Hitachi Ltd Test piece fine adjuster
JPS5413765A (en) * 1977-07-04 1979-02-01 Jeol Ltd Sample slanting equipment of scanning electron microscope or the like

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109471A (en) * 1977-03-07 1978-09-25 Hitachi Ltd Test piece fine adjuster
JPS5413765A (en) * 1977-07-04 1979-02-01 Jeol Ltd Sample slanting equipment of scanning electron microscope or the like

Also Published As

Publication number Publication date
JPH0227488Y2 (enrdf_load_stackoverflow) 1990-07-25

Similar Documents

Publication Publication Date Title
JPS5967850U (ja) 試料移動装置
JPS58193453U (ja) 電子線装置における反射電子検出装置
JPS6244452Y2 (enrdf_load_stackoverflow)
JPS6065967U (ja) 走査電子顕微鏡
JPH081611U (ja) レーザー光路切換器
JPS59110952U (ja) 走査型電子顕微鏡
JPS6282519A (ja) 光学式ピツクアツプの光照射角調整機構
JPH0142874Y2 (enrdf_load_stackoverflow)
JPS59133663U (ja) 電子ビ−ム蒸着装置
JPS614348U (ja) カソ−ドルミネツセンス装置
JPS5960738U (ja) 対物レンズ駆動装置
JPS60192123U (ja) 光学式円盤再生機
JPH0584014U (ja) 走査電子顕微鏡
JPS61289536A (ja) 光学式ピツクアツプの光照射角調整機構
JPH03210745A (ja) 試料傾斜装置
JPS58141238U (ja) フイルム保持装置
JPS6051621U (ja) 光学走査装置の支持装置
JPS5860851U (ja) 電子顕微鏡における試料ホルダ−
JPH03110692U (enrdf_load_stackoverflow)
JPS6353764A (ja) ビデオフロツピのヘツド位置決めカム機構
JPH0177257U (enrdf_load_stackoverflow)
JPS60121249U (ja) 走査電子顕微鏡等における試料装置
JPS6064778U (ja) ミシンの全回転釜の外釜
JPH01124654U (enrdf_load_stackoverflow)
JPS5834353U (ja) 試料微動装置