JPS5413765A - Sample slanting equipment of scanning electron microscope or the like - Google Patents

Sample slanting equipment of scanning electron microscope or the like

Info

Publication number
JPS5413765A
JPS5413765A JP7961477A JP7961477A JPS5413765A JP S5413765 A JPS5413765 A JP S5413765A JP 7961477 A JP7961477 A JP 7961477A JP 7961477 A JP7961477 A JP 7961477A JP S5413765 A JPS5413765 A JP S5413765A
Authority
JP
Japan
Prior art keywords
sample
slanting
equipment
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7961477A
Other languages
Japanese (ja)
Other versions
JPS5748828B2 (en
Inventor
Motohisa Kasahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP7961477A priority Critical patent/JPS5413765A/en
Publication of JPS5413765A publication Critical patent/JPS5413765A/en
Publication of JPS5748828B2 publication Critical patent/JPS5748828B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To limit a tilt angle corresponding to the distance between the object lens and sample surface, by causing the tolerance of the rotation angle of a tilting body to vary with the position in the light axis direction of the tilting body.
COPYRIGHT: (C)1979,JPO&Japio
JP7961477A 1977-07-04 1977-07-04 Sample slanting equipment of scanning electron microscope or the like Granted JPS5413765A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7961477A JPS5413765A (en) 1977-07-04 1977-07-04 Sample slanting equipment of scanning electron microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7961477A JPS5413765A (en) 1977-07-04 1977-07-04 Sample slanting equipment of scanning electron microscope or the like

Publications (2)

Publication Number Publication Date
JPS5413765A true JPS5413765A (en) 1979-02-01
JPS5748828B2 JPS5748828B2 (en) 1982-10-18

Family

ID=13694915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7961477A Granted JPS5413765A (en) 1977-07-04 1977-07-04 Sample slanting equipment of scanning electron microscope or the like

Country Status (1)

Country Link
JP (1) JPS5413765A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967850U (en) * 1982-10-29 1984-05-08 株式会社エービーティ Sample moving device
JPH0364462U (en) * 1989-10-26 1991-06-24

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967850U (en) * 1982-10-29 1984-05-08 株式会社エービーティ Sample moving device
JPH0227488Y2 (en) * 1982-10-29 1990-07-25
JPH0364462U (en) * 1989-10-26 1991-06-24

Also Published As

Publication number Publication date
JPS5748828B2 (en) 1982-10-18

Similar Documents

Publication Publication Date Title
JPS5430854A (en) Two-dimensional scanner
GB2010790A (en) Closures
JPS5413765A (en) Sample slanting equipment of scanning electron microscope or the like
JPS5231653A (en) Production of hexaboride cathode
JPS5323280A (en) Electoron ray exposure device
JPS52127259A (en) Observing surface sharpe
JPS5432899A (en) Laser processing device
JPS5258355A (en) X-ray detecting unit for electronic microscope
JPS5238944A (en) Optical system for scanning
JPS53123957A (en) Position detecting method
JPS5221714A (en) Solid stage scanning photo-electronic conversion
JPS53117463A (en) Position detection method
JPS5332677A (en) Electron beam exposure apparatus
JPS5326122A (en) Zoom lens
JPS51124370A (en) Focus correction device for scanning type electron microscope
JPS53140963A (en) Scanning electronic microscope
JPS545387A (en) Electron beam deflection scanner
JPS5352139A (en) Specimen supporting device
JPS5228334A (en) Two-dimentional scanning optical system of parallel luminous flux
DE3176642D1 (en) Electron microscope with scanning beam
JPS53105668A (en) Ball screw device
JPS53144328A (en) Focus detector
JPS5590040A (en) X-ray generator
JPS51118364A (en) Scanning type electric microscope
JPS5362978A (en) Electron microscope