JPS5258355A - X-ray detecting unit for electronic microscope - Google Patents

X-ray detecting unit for electronic microscope

Info

Publication number
JPS5258355A
JPS5258355A JP50133844A JP13384475A JPS5258355A JP S5258355 A JPS5258355 A JP S5258355A JP 50133844 A JP50133844 A JP 50133844A JP 13384475 A JP13384475 A JP 13384475A JP S5258355 A JPS5258355 A JP S5258355A
Authority
JP
Japan
Prior art keywords
detecting unit
ray detecting
electronic microscope
ray
test piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50133844A
Other languages
Japanese (ja)
Other versions
JPS567260B2 (en
Inventor
Tadao Watabe
Shigeto Sunakozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50133844A priority Critical patent/JPS5258355A/en
Publication of JPS5258355A publication Critical patent/JPS5258355A/en
Publication of JPS567260B2 publication Critical patent/JPS567260B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the change in X ray strength, by nearly keeping X ray picking up angle even if test piece is leaned, by arranging X ray detecting unit so that a plane containing the axis of electron beam and the tilt axis of test piece is opposed to the test piece.
COPYRIGHT: (C)1977,JPO&Japio
JP50133844A 1975-11-07 1975-11-07 X-ray detecting unit for electronic microscope Granted JPS5258355A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50133844A JPS5258355A (en) 1975-11-07 1975-11-07 X-ray detecting unit for electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50133844A JPS5258355A (en) 1975-11-07 1975-11-07 X-ray detecting unit for electronic microscope

Publications (2)

Publication Number Publication Date
JPS5258355A true JPS5258355A (en) 1977-05-13
JPS567260B2 JPS567260B2 (en) 1981-02-17

Family

ID=15114348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50133844A Granted JPS5258355A (en) 1975-11-07 1975-11-07 X-ray detecting unit for electronic microscope

Country Status (1)

Country Link
JP (1) JPS5258355A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773858U (en) * 1980-10-22 1982-05-07
JPS60100038A (en) * 1983-11-04 1985-06-03 Shimadzu Corp Surface layer analysis with x-ray microanalyzer
JPS612249A (en) * 1984-06-15 1986-01-08 Hitachi Ltd Scanning-type electron microscope
US4724320A (en) * 1984-09-26 1988-02-09 Shozo Ino Method of observing the arrangement of atoms on a surface and apparatus therefor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773858U (en) * 1980-10-22 1982-05-07
JPS6224933Y2 (en) * 1980-10-22 1987-06-25
JPS60100038A (en) * 1983-11-04 1985-06-03 Shimadzu Corp Surface layer analysis with x-ray microanalyzer
JPS612249A (en) * 1984-06-15 1986-01-08 Hitachi Ltd Scanning-type electron microscope
US4724320A (en) * 1984-09-26 1988-02-09 Shozo Ino Method of observing the arrangement of atoms on a surface and apparatus therefor

Also Published As

Publication number Publication date
JPS567260B2 (en) 1981-02-17

Similar Documents

Publication Publication Date Title
JPS5258355A (en) X-ray detecting unit for electronic microscope
JPS5365774A (en) Radiant ray detector
JPS5239366A (en) Electronic gun device
JPS5315741A (en) Cathode-ray tube
JPS53145562A (en) Electronic gun
JPS5413249A (en) Cathode ray tube
JPS51124981A (en) A gamma ray scintillation detector
JPS53122369A (en) Automatic alignment unit for wafer
JPS51116671A (en) Scanning type electron microscope
JPS51146850A (en) Optical detector
JPS523378A (en) Electronic ray detector
JPS53140963A (en) Scanning electronic microscope
JPS53105316A (en) Pick up unit
JPS5420757A (en) Metal detector
JPS5216256A (en) Measuring device of light ray type
JPS53118967A (en) Fluorescent screen
JPS53113480A (en) Reflecting electron beam detector
JPS5353975A (en) Electronic beam exposure device
JPS5271239A (en) Electron beam sensitive material
JPS5250123A (en) Purity aberration detection equipment
JPS51113567A (en) Cathode ray brightness examination unit
JPS5332667A (en) Secondary electron detector
JPS53142876A (en) Development method of electron ray resist and elctron beam resist
JPS5411678A (en) Electron ray unit
JPS53125891A (en) Air-tight tester for sealed hard container