JPH0221740U - - Google Patents
Info
- Publication number
- JPH0221740U JPH0221740U JP10025688U JP10025688U JPH0221740U JP H0221740 U JPH0221740 U JP H0221740U JP 10025688 U JP10025688 U JP 10025688U JP 10025688 U JP10025688 U JP 10025688U JP H0221740 U JPH0221740 U JP H0221740U
- Authority
- JP
- Japan
- Prior art keywords
- loop
- shaped conveyor
- thin film
- substrates
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 4
- 230000008021 deposition Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10025688U JPH0221740U (fr) | 1988-07-28 | 1988-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10025688U JPH0221740U (fr) | 1988-07-28 | 1988-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221740U true JPH0221740U (fr) | 1990-02-14 |
Family
ID=31328175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10025688U Pending JPH0221740U (fr) | 1988-07-28 | 1988-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221740U (fr) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005228771A (ja) * | 2004-02-10 | 2005-08-25 | Shinko Electric Co Ltd | 基板搬送方法、及びその装置 |
| JP2009515368A (ja) * | 2005-11-07 | 2009-04-09 | ブルックス オートメーション インコーポレイテッド | 小容積キャリヤ搬送体、積載ポート、バッファーシステム |
| JP2009537075A (ja) * | 2006-05-11 | 2009-10-22 | ブルックス オートメーション インコーポレイテッド | 低減容量キャリア、搬送機、積載ポート、緩衝装置システム |
| JP2014123660A (ja) * | 2012-12-21 | 2014-07-03 | Senju Metal Ind Co Ltd | 搬送処理システム |
-
1988
- 1988-07-28 JP JP10025688U patent/JPH0221740U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005228771A (ja) * | 2004-02-10 | 2005-08-25 | Shinko Electric Co Ltd | 基板搬送方法、及びその装置 |
| JP2009515368A (ja) * | 2005-11-07 | 2009-04-09 | ブルックス オートメーション インコーポレイテッド | 小容積キャリヤ搬送体、積載ポート、バッファーシステム |
| JP2009537075A (ja) * | 2006-05-11 | 2009-10-22 | ブルックス オートメーション インコーポレイテッド | 低減容量キャリア、搬送機、積載ポート、緩衝装置システム |
| JP2014123660A (ja) * | 2012-12-21 | 2014-07-03 | Senju Metal Ind Co Ltd | 搬送処理システム |
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