JPH0221740U - - Google Patents
Info
- Publication number
- JPH0221740U JPH0221740U JP10025688U JP10025688U JPH0221740U JP H0221740 U JPH0221740 U JP H0221740U JP 10025688 U JP10025688 U JP 10025688U JP 10025688 U JP10025688 U JP 10025688U JP H0221740 U JPH0221740 U JP H0221740U
- Authority
- JP
- Japan
- Prior art keywords
- loop
- shaped conveyor
- thin film
- substrates
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 4
- 230000008021 deposition Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10025688U JPH0221740U (fr) | 1988-07-28 | 1988-07-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10025688U JPH0221740U (fr) | 1988-07-28 | 1988-07-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0221740U true JPH0221740U (fr) | 1990-02-14 |
Family
ID=31328175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10025688U Pending JPH0221740U (fr) | 1988-07-28 | 1988-07-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0221740U (fr) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005228771A (ja) * | 2004-02-10 | 2005-08-25 | Shinko Electric Co Ltd | 基板搬送方法、及びその装置 |
JP2009515368A (ja) * | 2005-11-07 | 2009-04-09 | ブルックス オートメーション インコーポレイテッド | 小容積キャリヤ搬送体、積載ポート、バッファーシステム |
JP2009537075A (ja) * | 2006-05-11 | 2009-10-22 | ブルックス オートメーション インコーポレイテッド | 低減容量キャリア、搬送機、積載ポート、緩衝装置システム |
JP2014123660A (ja) * | 2012-12-21 | 2014-07-03 | Senju Metal Ind Co Ltd | 搬送処理システム |
-
1988
- 1988-07-28 JP JP10025688U patent/JPH0221740U/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005228771A (ja) * | 2004-02-10 | 2005-08-25 | Shinko Electric Co Ltd | 基板搬送方法、及びその装置 |
JP2009515368A (ja) * | 2005-11-07 | 2009-04-09 | ブルックス オートメーション インコーポレイテッド | 小容積キャリヤ搬送体、積載ポート、バッファーシステム |
JP2009537075A (ja) * | 2006-05-11 | 2009-10-22 | ブルックス オートメーション インコーポレイテッド | 低減容量キャリア、搬送機、積載ポート、緩衝装置システム |
JP2014123660A (ja) * | 2012-12-21 | 2014-07-03 | Senju Metal Ind Co Ltd | 搬送処理システム |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE2966176D1 (en) | Article comprising a substrate and an overlying processing layer of actinic radiation-sensitive material and process for fabrication of the article | |
JPS54154289A (en) | Manufacture of thin-film transistor array | |
KR890004408A (ko) | 반도체장치 제조시에 기판상에 형성되는 레지스트층의 애슁법 | |
EP0724292A3 (fr) | Procédé pour la fabrication d'interconnexions à multi-couche dans un dispositif semi-conducteur | |
JP2701765B2 (ja) | 半導体装置の製造方法 | |
JPH0221740U (fr) | ||
JPH0229527U (fr) | ||
JP2000223795A (ja) | フレキシブル配線基板及びその製造方法 | |
JPS5299085A (en) | Production of semiconductor device | |
JPS6459936A (en) | Manufacture of integrated circuit | |
JPS57167659A (en) | Manufacture of semiconductor device | |
JPS5636120A (en) | Manufacture of magnetic bubble device | |
JPS63157054U (fr) | ||
JP2946102B2 (ja) | パターン形成方法 | |
JPS57170524A (en) | Manufacture of semiconductor device | |
JPH03154214A (ja) | 導体パターン形成方法と磁気ヘッドの製造方法 | |
JPS568834A (en) | Manufacture of projection for substrate conductor layer | |
JPH10284824A (ja) | プリント配線基板の製造方法及びローラ回転式コンベア | |
JPS6450540A (en) | Isolation of microelement | |
JPH0715137Y2 (ja) | ウエハー保持装置 | |
JPS5696845A (en) | Manufacture of semiconductor device | |
JPS57192048A (en) | Manufacture of semiconductor device | |
JPS56130951A (en) | Manufacture of semiconductor device | |
JPS57199238A (en) | Manufacture of semiconductor device | |
JPS62133723A (ja) | 半導体装置の製造方法 |