JPH02140853U - - Google Patents

Info

Publication number
JPH02140853U
JPH02140853U JP4901589U JP4901589U JPH02140853U JP H02140853 U JPH02140853 U JP H02140853U JP 4901589 U JP4901589 U JP 4901589U JP 4901589 U JP4901589 U JP 4901589U JP H02140853 U JPH02140853 U JP H02140853U
Authority
JP
Japan
Prior art keywords
thin film
film transistors
insulating layer
interconnection structure
contact hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4901589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4901589U priority Critical patent/JPH02140853U/ja
Priority to CA000613680A priority patent/CA1313563C/en
Priority to US07/415,889 priority patent/US5084905A/en
Priority to DE68923054T priority patent/DE68923054T2/de
Priority to EP89119842A priority patent/EP0366116B1/en
Priority to KR1019890015469A priority patent/KR940004764B1/ko
Publication of JPH02140853U publication Critical patent/JPH02140853U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Thin Film Transistor (AREA)
JP4901589U 1988-10-26 1989-04-26 Pending JPH02140853U (OSRAM)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP4901589U JPH02140853U (OSRAM) 1989-04-26 1989-04-26
CA000613680A CA1313563C (en) 1988-10-26 1989-09-27 Thin film transistor panel
US07/415,889 US5084905A (en) 1988-10-26 1989-10-02 Thin film transistor panel and manufacturing method thereof
DE68923054T DE68923054T2 (de) 1988-10-26 1989-10-25 Dünnschicht-Transistortafel und Herstellungsverfahren.
EP89119842A EP0366116B1 (en) 1988-10-26 1989-10-25 Thin film transistor panel and manufacturing method thereof
KR1019890015469A KR940004764B1 (ko) 1988-10-26 1989-10-26 박막트랜지스타 판넬 및 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4901589U JPH02140853U (OSRAM) 1989-04-26 1989-04-26

Publications (1)

Publication Number Publication Date
JPH02140853U true JPH02140853U (OSRAM) 1990-11-26

Family

ID=31566340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4901589U Pending JPH02140853U (OSRAM) 1988-10-26 1989-04-26

Country Status (1)

Country Link
JP (1) JPH02140853U (OSRAM)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868965A (ja) * 1981-10-21 1983-04-25 Hitachi Ltd 受光素子の製造方法
JPS59205738A (ja) * 1983-05-10 1984-11-21 Seiko Epson Corp アクテイブマトリツクス基板

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868965A (ja) * 1981-10-21 1983-04-25 Hitachi Ltd 受光素子の製造方法
JPS59205738A (ja) * 1983-05-10 1984-11-21 Seiko Epson Corp アクテイブマトリツクス基板

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