JPH10163463A5 - - Google Patents
Info
- Publication number
- JPH10163463A5 JPH10163463A5 JP1996321566A JP32156696A JPH10163463A5 JP H10163463 A5 JPH10163463 A5 JP H10163463A5 JP 1996321566 A JP1996321566 A JP 1996321566A JP 32156696 A JP32156696 A JP 32156696A JP H10163463 A5 JPH10163463 A5 JP H10163463A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- charge collector
- insulating film
- layer
- drain electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32156696A JP3729953B2 (ja) | 1996-12-02 | 1996-12-02 | Ｔｆｔアレイ基板とその製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32156696A JP3729953B2 (ja) | 1996-12-02 | 1996-12-02 | Ｔｆｔアレイ基板とその製法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10163463A JPH10163463A (ja) | 1998-06-19 |
| JPH10163463A5 true JPH10163463A5 (OSRAM) | 2004-11-18 |
| JP3729953B2 JP3729953B2 (ja) | 2005-12-21 |
Family
ID=18134006
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32156696A Expired - Fee Related JP3729953B2 (ja) | 1996-12-02 | 1996-12-02 | Ｔｆｔアレイ基板とその製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3729953B2 (OSRAM) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6501098B2 (en) | 1998-11-25 | 2002-12-31 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device |
| KR100577410B1 (ko) * | 1999-11-30 | 2006-05-08 | 엘지.필립스 엘시디 주식회사 | 엑스레이 영상 감지소자 및 그 제조방법 |
| US6559506B1 (en) * | 2002-04-03 | 2003-05-06 | General Electric Company | Imaging array and methods for fabricating same |
| US6740884B2 (en) * | 2002-04-03 | 2004-05-25 | General Electric Company | Imaging array and methods for fabricating same |
| CN101044627B (zh) | 2004-09-15 | 2012-02-08 | 株式会社半导体能源研究所 | 半导体器件 |
| TWI285929B (en) * | 2006-02-15 | 2007-08-21 | Au Optronics Corp | Manufacturing method of pixel structure |
| KR20250048807A (ko) | 2009-12-25 | 2025-04-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| JP6345544B2 (ja) * | 2013-09-05 | 2018-06-20 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| CN105789324B (zh) * | 2016-04-15 | 2019-05-03 | 京东方科技集团股份有限公司 | 传感器及其制造方法、电子设备 |
-
1996
- 1996-12-02 JP JP32156696A patent/JP3729953B2/ja not_active Expired - Fee Related
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