JPH02110400A - 位相差像を製造する方法および装置 - Google Patents

位相差像を製造する方法および装置

Info

Publication number
JPH02110400A
JPH02110400A JP1144307A JP14430789A JPH02110400A JP H02110400 A JPH02110400 A JP H02110400A JP 1144307 A JP1144307 A JP 1144307A JP 14430789 A JP14430789 A JP 14430789A JP H02110400 A JPH02110400 A JP H02110400A
Authority
JP
Japan
Prior art keywords
phase
detector
ring
diaphragm
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1144307A
Other languages
English (en)
Japanese (ja)
Inventor
Augustin Siegel
アウグスチン・ジーゲル
Gunter Schmahl
ギユンター・シユマール
Dietbert Rudolph
デイートベルト・ルードルフ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19883819604 external-priority patent/DE3819604A1/de
Priority claimed from DE19883819603 external-priority patent/DE3819603A1/de
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Publication of JPH02110400A publication Critical patent/JPH02110400A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/14—Condensers affording illumination for phase-contrast observation

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Microscoopes, Condenser (AREA)
JP1144307A 1988-06-09 1989-06-08 位相差像を製造する方法および装置 Pending JPH02110400A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE19883819604 DE3819604A1 (de) 1988-06-09 1988-06-09 Verfahren und einrichtung zur erzeugung von phasenkontrastbildern
DE19883819603 DE3819603A1 (de) 1988-06-09 1988-06-09 Verfahren und einrichtung zur erzeugung von phasenkontrastbildern im roentgenbereich
DE3819603.4 1988-06-09
DE3819604.2 1988-06-09

Publications (1)

Publication Number Publication Date
JPH02110400A true JPH02110400A (ja) 1990-04-23

Family

ID=25868958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1144307A Pending JPH02110400A (ja) 1988-06-09 1989-06-08 位相差像を製造する方法および装置

Country Status (3)

Country Link
US (1) US4953188A (en, 2012)
JP (1) JPH02110400A (en, 2012)
CH (1) CH678663A5 (en, 2012)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0289016A (ja) * 1988-09-26 1990-03-29 Nikon Corp 走査型顕微鏡
US5199057A (en) * 1989-08-09 1993-03-30 Nikon Corporation Image formation-type soft X-ray microscopic apparatus
JP2918938B2 (ja) * 1989-11-15 1999-07-12 オリンパス光学工業株式会社 顕微鏡用ターレットコンデンサー
US6092728A (en) * 1992-03-30 2000-07-25 Symbol Technologies, Inc. Miniature laser diode focusing module using micro-optics
JP3703483B2 (ja) * 1993-09-15 2005-10-05 カール−ツァイス−スチフツング 位相コントラスト−ｘ線顕微鏡
US6449088B1 (en) * 1993-11-05 2002-09-10 Emcal Variable darkfield illumination system for micro and macro optical imagers
US5459576A (en) * 1994-01-24 1995-10-17 Display Inspection Systems, Inc. Differential phase contrast inspection system
US5880880A (en) * 1995-01-13 1999-03-09 The General Hospital Corp. Three-dimensional scanning confocal laser microscope
AUPN201295A0 (en) * 1995-03-28 1995-04-27 Commonwealth Scientific And Industrial Research Organisation Simplified conditions and configurations for phase-contrast imaging with hard x-rays
US5880467A (en) * 1997-03-05 1999-03-09 The United States Of America As Represented By The Secretary Of Commerce Microcalorimeter x-ray detectors with x-ray lens
AUPP690098A0 (en) * 1998-11-02 1998-11-26 University Of Melbourne, The Phase determination of a radiation wave field
US6332017B1 (en) 1999-01-25 2001-12-18 Vanderbilt University System and method for producing pulsed monochromatic X-rays
US6327335B1 (en) 1999-04-13 2001-12-04 Vanderbilt University Apparatus and method for three-dimensional imaging using a stationary monochromatic x-ray beam
US6545790B2 (en) * 1999-11-08 2003-04-08 Ralph W. Gerchberg System and method for recovering phase information of a wave front
FR2816413B1 (fr) * 2000-11-06 2003-12-05 Vincent Lauer Microscope pour objets diffractants
DE60123450D1 (de) * 2000-11-06 2006-11-09 Vincent Lauer Mikroskop für beugungsobjekte
US6870896B2 (en) 2000-12-28 2005-03-22 Osmic, Inc. Dark-field phase contrast imaging
JP3942363B2 (ja) * 2001-02-09 2007-07-11 日本電子株式会社 透過電子顕微鏡の位相板用レンズシステム、および透過電子顕微鏡
US6804324B2 (en) * 2001-03-01 2004-10-12 Osmo, Inc. X-ray phase contrast imaging using a fabry-perot interferometer concept
US7365909B2 (en) * 2002-10-17 2008-04-29 Xradia, Inc. Fabrication methods for micro compounds optics
US7302592B2 (en) * 2002-12-02 2007-11-27 Silverbrook Research Pty Ltd Integrated circuit which disables writing circuitry to memory when the power drops below a power threshold predetermined and controlled by the processor
US7119953B2 (en) * 2002-12-27 2006-10-10 Xradia, Inc. Phase contrast microscope for short wavelength radiation and imaging method
US20040184144A1 (en) * 2002-12-31 2004-09-23 Goodwin Paul C. Wavelength-specific phase microscopy
US7486984B2 (en) * 2004-05-19 2009-02-03 Mxisystems, Inc. System and method for monochromatic x-ray beam therapy
DE102005016124A1 (de) * 2005-04-08 2006-10-12 Robert Bosch Gmbh Sensorvorrichtung einer Verpackungsmaschine
US7684048B2 (en) 2005-11-15 2010-03-23 Applied Materials Israel, Ltd. Scanning microscopy
DE102006011615A1 (de) 2006-03-14 2007-09-20 Carl Zeiss Nts Gmbh Phasenkontrast-Elektronenmikroskop
JP4997334B2 (ja) * 2007-11-02 2012-08-08 ウェイヴフロント アナリシス インコーポレイテッド 超解像を達成するための新規なデジタル方法を有する光学顕微鏡
CN101868740B (zh) * 2007-11-23 2012-10-10 皇家飞利浦电子股份有限公司 多模式光斑发生器和多模式多光斑扫描显微镜
US20090174935A1 (en) * 2008-01-09 2009-07-09 Szulczewski Michael J Scanning microscope having complementary, serial scanners
JP5285306B2 (ja) * 2008-03-06 2013-09-11 豊 末永 光学部品及び光学部品を用いた位相差顕微鏡
US8294989B2 (en) * 2009-07-30 2012-10-23 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Apparatus and method for creating a photonic densely-accumulated ray-point
WO2015027029A1 (en) 2013-08-23 2015-02-26 Carl Zeiss X-ray Microscopy, Inc. Phase contrast imaging using patterned illumination/detector and phase mask
US11237059B1 (en) * 2020-12-14 2022-02-01 Gerchberg Ophthalmic Dispensing, PLLC Totagraphy: Coherent diffractive/digital information reconstruction by iterative phase recovery using special masks

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE814796C (de) * 1949-09-08 1951-09-27 Lothar Straub Verfahren und Vorrichtung zur Beleuchtung mikroskopischer Objekte
US3628848A (en) * 1969-12-23 1971-12-21 Anvar Variable phase contrast microscopy
JPS6049300A (ja) * 1983-08-29 1985-03-18 日本電子株式会社 Ｘ線顕微鏡
JPS6188200A (ja) * 1984-10-05 1986-05-06 日本電子株式会社 Ｘ線照射系
DE3642457A1 (de) * 1986-12-12 1988-06-30 Zeiss Carl Fa Roentgen-mikroskop
JPS63192000A (ja) * 1987-02-04 1988-08-09 日本電子株式会社 Ｘ線光学系

Also Published As

Publication number Publication date
US4953188A (en) 1990-08-28
CH678663A5 (en, 2012) 1991-10-15

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