JPH0192130U - - Google Patents
Info
- Publication number
- JPH0192130U JPH0192130U JP18693787U JP18693787U JPH0192130U JP H0192130 U JPH0192130 U JP H0192130U JP 18693787 U JP18693787 U JP 18693787U JP 18693787 U JP18693787 U JP 18693787U JP H0192130 U JPH0192130 U JP H0192130U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- coating
- cleaning
- wafer
- chucks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 239000007788 liquid Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案の一実施例を示す断面図である
。 １……ウエハ、２……スピンモータ、３……基
体、５……ノズル、６……バツクリンスノズル、
７……カツプ。
。 １……ウエハ、２……スピンモータ、３……基
体、５……ノズル、６……バツクリンスノズル、
７……カツプ。
Claims (1)
- 半導体基板を真空吸着し、塗布液滴下後、該ウ
エハを回転運動させ所望の膜を得る塗布装置にお
いて、複数の基板洗浄用バツクリンスノズルを基
板裏面の径方向に沿つて配置したことを特徴とす
る塗布装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18693787U JPH0192130U (ja) | 1987-12-08 | 1987-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18693787U JPH0192130U (ja) | 1987-12-08 | 1987-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0192130U true JPH0192130U (ja) | 1989-06-16 |
Family
ID=31478132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18693787U Pending JPH0192130U (ja) | 1987-12-08 | 1987-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0192130U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017098295A (ja) * | 2015-11-18 | 2017-06-01 | トヨタ自動車株式会社 | 半導体装置の製造装置及び製造方法 |
-
1987
- 1987-12-08 JP JP18693787U patent/JPH0192130U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017098295A (ja) * | 2015-11-18 | 2017-06-01 | トヨタ自動車株式会社 | 半導体装置の製造装置及び製造方法 |