JPH0176611U - - Google Patents

Info

Publication number
JPH0176611U
JPH0176611U JP1987170757U JP17075787U JPH0176611U JP H0176611 U JPH0176611 U JP H0176611U JP 1987170757 U JP1987170757 U JP 1987170757U JP 17075787 U JP17075787 U JP 17075787U JP H0176611 U JPH0176611 U JP H0176611U
Authority
JP
Japan
Prior art keywords
servo motor
rotary table
positioning device
rotor
rotation angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987170757U
Other languages
English (en)
Other versions
JP2554669Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987170757U priority Critical patent/JP2554669Y2/ja
Priority to US07/268,925 priority patent/US4899998A/en
Priority to DE3838019A priority patent/DE3838019C2/de
Publication of JPH0176611U publication Critical patent/JPH0176611U/ja
Application granted granted Critical
Publication of JP2554669Y2 publication Critical patent/JP2554669Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0078—Safety devices protecting the operator, e.g. against accident or noise
    • B23Q11/0092—Safety devices protecting the operator, e.g. against accident or noise actuating braking or stopping means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
    • B23Q1/52—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism a single rotating pair
    • B23Q1/522—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism a single rotating pair which is perpendicular to the working surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Control Of Position Or Direction (AREA)
  • Machine Tool Units (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の回転位置決め装置の一部を
断面で示す平面図、第２図はその縦断面図、第３
図は回転位置決め装置の斜視図、第４図はこの考
案における回転角検出手段の取付け状態を示す横
断面図、第５図は第４図の―断面図、第６図
は第１図の―断面図図、第７図は第６図の
―断面図、第８図は第２図のＡ部拡大断面図、
第９図はこの考案におけるブレーキ機構を示す断
面図、第１０図は従来の回転位置決め装置を示す
斜視図である。 符号説明、１０…回転テーブル、１２…回転子
、１４…固定子、１６…サーボモータ、１８…デ
イスク、２０…回転角検出手段、２２…遮光板、
２６，２７…センサ、２８…原点用検出部、２９
…オーバーラン用検出部、３０…電磁ブレーキ（
ブレーキ機構）、３１…アーマチユア、３２…ス
プリング、３３…ソレノイド、４０…ケース、４
１…ベース、５０…制御部。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) ワークを支持する回転テーブルと、上記回
    転テーブルを固定する回転子を有するサーボモー
    タと、上記回転テーブルの回転位置を検出する回
    転角検出手段及び上記回転テーブルの回転を制動
    するブレーキ機構を具備すると共に、上記サーボ
    モータ、回転角検出手段及びブレーキ機構をケー
    ス内に内蔵して成ることを特徴とする回転位置決
    め装置。 (2) 回転角検出手段が、サーボモータの回転子
    に固定される遮光板と、この遮光板のマークを光
    学的に検出する光学センサとで構成されるエンコ
    ーダである実用新案登録請求の範囲第１項記載の
    回転位置決め装置。 (3) ブレーキ機構が、サーボモータの回転子に
    固定されるデイスクに接離自在なアーマチユアと
    、常時アーマチユアを上記デイスクに押圧する弾
    性手段に抗してアーマチユアを吸着し得るソレノ
    イドとで構成される電磁ブレーキである実用新案
    登録請求の範囲第１項記載の回転位置決め装置。
JP1987170757U 1987-11-10 1987-11-10 回転位置決め装置 Expired - Lifetime JP2554669Y2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1987170757U JP2554669Y2 (ja) 1987-11-10 1987-11-10 回転位置決め装置
US07/268,925 US4899998A (en) 1987-11-10 1988-11-09 Rotational positioning device
DE3838019A DE3838019C2 (de) 1987-11-10 1988-11-09 Drehpositioniervorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987170757U JP2554669Y2 (ja) 1987-11-10 1987-11-10 回転位置決め装置

Publications (2)

Publication Number Publication Date
JPH0176611U true JPH0176611U (ja) 1989-05-24
JP2554669Y2 JP2554669Y2 (ja) 1997-11-17

Family

ID=15910821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987170757U Expired - Lifetime JP2554669Y2 (ja) 1987-11-10 1987-11-10 回転位置決め装置

Country Status (3)

Country Link
US (1) US4899998A (ja)
JP (1) JP2554669Y2 (ja)
DE (1) DE3838019C2 (ja)

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JP2573657Y2 (ja) * 1990-07-10 1998-06-04 日本精工株式会社 回転軸のクランプ装置
DE4035189A1 (de) * 1990-11-06 1992-05-07 Mauser Werke Oberndorf Vorrichtung zur drehwinkelpositionierung einer mit exzenterorganen versehenen welle
US6380751B2 (en) * 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5345170A (en) * 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US5551142A (en) * 1995-01-05 1996-09-03 Dayton-Phoenix Group, Inc. Stator lamination jig system
US6232789B1 (en) * 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5561377A (en) * 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US5676360A (en) * 1995-07-11 1997-10-14 Boucher; John N. Machine tool rotary table locking apparatus
US5914613A (en) * 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6002263A (en) * 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6256882B1 (en) * 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
IT1304700B1 (it) * 1998-12-23 2001-03-28 Antas S P A Apparecchiatura per la lavorazione del vetro con sistema a giostraperfezionato e suo metodo di controllo
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6445202B1 (en) * 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6838890B2 (en) * 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US6483336B1 (en) 2000-05-03 2002-11-19 Cascade Microtech, Inc. Indexing rotatable chuck for a probe station
US6914423B2 (en) * 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) * 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
AT409606B (de) * 2000-09-22 2002-09-25 Ant Panhans Werkzeug Masch Plattenaufteilsäge
DE20114544U1 (de) 2000-12-04 2002-02-21 Cascade Microtech Inc Wafersonde
JP2002192434A (ja) 2000-12-26 2002-07-10 Mori Seiki Co Ltd 自動工具交換装置
WO2003052435A1 (en) 2001-08-21 2003-06-26 Cascade Microtech, Inc. Membrane probing system
US6836135B2 (en) * 2001-08-31 2004-12-28 Cascade Microtech, Inc. Optical testing device
DE10149180A1 (de) * 2001-10-04 2003-04-30 Peiseler Gmbh & Co Kg Rundschalttisch
US6777964B2 (en) * 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
AU2003233659A1 (en) * 2002-05-23 2003-12-12 Cascade Microtech, Inc. Probe for testing a device under test
US6847219B1 (en) * 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US6724205B1 (en) * 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7250779B2 (en) * 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) * 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7221172B2 (en) * 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7057404B2 (en) * 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7492172B2 (en) * 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
DE10332424B4 (de) * 2003-07-16 2006-04-06 Peiseler Gmbh & Co. Kg Rundschalttisch
WO2006017078A2 (en) * 2004-07-07 2006-02-16 Cascade Microtech, Inc. Probe head having a membrane suspended probe
US7250626B2 (en) * 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US8087858B2 (en) * 2003-12-01 2012-01-03 Sherline Products Inc. Vise-mounted milling machine collet indexer
US7187188B2 (en) * 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
WO2005065258A2 (en) * 2003-12-24 2005-07-21 Cascade Microtech, Inc. Active wafer probe
US7330041B2 (en) * 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
WO2006031646A2 (en) 2004-09-13 2006-03-23 Cascade Microtech, Inc. Double sided probing structures
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US20060169897A1 (en) * 2005-01-31 2006-08-03 Cascade Microtech, Inc. Microscope system for testing semiconductors
DE102005032902A1 (de) * 2005-07-12 2007-01-18 Müller Weingarten AG Teilapparat für Nutenstanzautomaten mit Direktantrieb
DE112006002378T5 (de) * 2005-09-12 2008-07-17 Kabushiki Kaisha Yaskawa Denki, Kitakyushu Ausrichtungsvorrichtung, Verfahren zum Zurückkehren zu einem Ausgangspunkt für eine Ausrichtungsvorrichtung, Drehtisch, Translationstisch oder Maschine mit einer Ausrichtungsvorrichtung und Maschinensteuersystem
US7638963B2 (en) * 2005-09-26 2009-12-29 Centricity Corporation Rotary indexing table driven by an induction motor
US7723999B2 (en) * 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7403028B2 (en) * 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
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CN102990456B (zh) * 2011-09-08 2015-04-15 鸿富锦精密工业（深圳）有限公司 凸轮分割器
JP5887376B2 (ja) * 2014-04-09 2016-03-16 ファナック株式会社 回転軸を有する放電加工機
TWI662869B (zh) * 2016-01-28 2019-06-11 至禾機器工業有限公司 加工機組件之驅動裝置
CN107932094A (zh) * 2017-10-24 2018-04-20 广州市昊志机电股份有限公司 一种盘式电机直驱转台
CN107962406A (zh) * 2017-10-24 2018-04-27 广州市昊志机电股份有限公司 一种低速直驱大扭矩数控转台
CN107932095A (zh) * 2017-10-24 2018-04-20 广州市昊志机电股份有限公司 一种直驱数控转台
CN107972605B (zh) * 2017-11-21 2021-01-08 上海航天测控通信研究所 一种高精度车载转台
CN109352423B (zh) * 2018-09-29 2021-05-28 西安飞机工业（集团）有限责任公司 数控机床ab摆角精度检测系统
CN111746959A (zh) * 2020-06-30 2020-10-09 西安精雕精密机械工程有限公司 一种适用于自动化加工单元的闭环旋转料仓
CN113619984A (zh) * 2021-09-14 2021-11-09 珠海格力精密模具有限公司 智能仓储装置、智能加工设备及其控制方法

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Also Published As

Publication number Publication date
DE3838019A1 (de) 1989-05-18
US4899998A (en) 1990-02-13
DE3838019C2 (de) 1996-02-01
JP2554669Y2 (ja) 1997-11-17

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