JPH0158711B2 - - Google Patents
Info
- Publication number
- JPH0158711B2 JPH0158711B2 JP56042490A JP4249081A JPH0158711B2 JP H0158711 B2 JPH0158711 B2 JP H0158711B2 JP 56042490 A JP56042490 A JP 56042490A JP 4249081 A JP4249081 A JP 4249081A JP H0158711 B2 JPH0158711 B2 JP H0158711B2
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- shape
- light
- layer
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 12
- 238000009792 diffusion process Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000003491 array Methods 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/024—Details of scanning heads ; Means for illuminating the original
- H04N1/028—Details of scanning heads ; Means for illuminating the original for picture information pick-up
- H04N1/03—Details of scanning heads ; Means for illuminating the original for picture information pick-up with photodetectors arranged in a substantially linear array
- H04N1/031—Details of scanning heads ; Means for illuminating the original for picture information pick-up with photodetectors arranged in a substantially linear array the photodetectors having a one-to-one and optically positive correspondence with the scanned picture elements, e.g. linear contact sensors
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Facsimile Heads (AREA)
- Facsimile Scanning Arrangements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56042490A JPS57157680A (en) | 1981-03-25 | 1981-03-25 | Line sensor for picture reading |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56042490A JPS57157680A (en) | 1981-03-25 | 1981-03-25 | Line sensor for picture reading |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57157680A JPS57157680A (en) | 1982-09-29 |
| JPH0158711B2 true JPH0158711B2 (fr) | 1989-12-13 |
Family
ID=12637499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56042490A Granted JPS57157680A (en) | 1981-03-25 | 1981-03-25 | Line sensor for picture reading |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57157680A (fr) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6133072A (ja) * | 1984-07-26 | 1986-02-15 | Toshiba Corp | 読取装置 |
| JPS61198859A (ja) * | 1985-02-27 | 1986-09-03 | Toshiba Corp | 読取装置 |
| KR900002808B1 (ko) * | 1984-07-26 | 1990-04-30 | 가부시끼 가이샤 도시바 | 화상 판독 장치 |
| JP2510149B2 (ja) * | 1984-09-27 | 1996-06-26 | 松下電子工業株式会社 | 固体撮像装置 |
| JPS6242448A (ja) * | 1985-08-19 | 1987-02-24 | Seiko Epson Corp | 固体撮像装置 |
| JP3013189B2 (ja) * | 1990-07-26 | 2000-02-28 | セイコーインスツルメンツ株式会社 | 密着型イメージセンサ |
| US5329149A (en) * | 1990-10-12 | 1994-07-12 | Seiko Instruments Inc. | Image sensor with non-light-transmissive layer having photosensing windows |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5415645A (en) * | 1977-06-08 | 1979-02-05 | Seiko Epson Corp | Oscillation circuit |
| JPS5468107A (en) * | 1977-11-11 | 1979-06-01 | Toshiba Corp | Pick up unit |
-
1981
- 1981-03-25 JP JP56042490A patent/JPS57157680A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5415645A (en) * | 1977-06-08 | 1979-02-05 | Seiko Epson Corp | Oscillation circuit |
| JPS5468107A (en) * | 1977-11-11 | 1979-06-01 | Toshiba Corp | Pick up unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57157680A (en) | 1982-09-29 |
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