JPH0158455B2 - - Google Patents

Info

Publication number
JPH0158455B2
JPH0158455B2 JP59240300A JP24030084A JPH0158455B2 JP H0158455 B2 JPH0158455 B2 JP H0158455B2 JP 59240300 A JP59240300 A JP 59240300A JP 24030084 A JP24030084 A JP 24030084A JP H0158455 B2 JPH0158455 B2 JP H0158455B2
Authority
JP
Japan
Prior art keywords
gas
hydride
ultraviolet irradiation
ultraviolet
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59240300A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61118647A (ja
Inventor
Hiroaki Tao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP59240300A priority Critical patent/JPS61118647A/ja
Priority to US06/797,864 priority patent/US4698314A/en
Publication of JPS61118647A publication Critical patent/JPS61118647A/ja
Publication of JPH0158455B2 publication Critical patent/JPH0158455B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/16—Phosphorus containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/16—Phosphorus containing
    • Y10T436/163333—Organic [e.g., chemical warfare agents, insecticides, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y10T436/25875—Gaseous sample or with change of physical state

Landscapes

  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Molecular Biology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
JP59240300A 1984-11-14 1984-11-14 半導体製造用水素化物ガスの検知装置 Granted JPS61118647A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP59240300A JPS61118647A (ja) 1984-11-14 1984-11-14 半導体製造用水素化物ガスの検知装置
US06/797,864 US4698314A (en) 1984-11-14 1985-11-14 Method for measurement of gas concentration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59240300A JPS61118647A (ja) 1984-11-14 1984-11-14 半導体製造用水素化物ガスの検知装置

Publications (2)

Publication Number Publication Date
JPS61118647A JPS61118647A (ja) 1986-06-05
JPH0158455B2 true JPH0158455B2 (enExample) 1989-12-12

Family

ID=17057412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59240300A Granted JPS61118647A (ja) 1984-11-14 1984-11-14 半導体製造用水素化物ガスの検知装置

Country Status (2)

Country Link
US (1) US4698314A (enExample)
JP (1) JPS61118647A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03114754U (enExample) * 1990-03-05 1991-11-26

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5266270A (en) * 1985-06-17 1993-11-30 Institut Francais Du Petrole On-line test and analysis process and equipment making it possible to establish a material balance of a chemical reaction
US4778998A (en) * 1987-06-05 1988-10-18 Mine Safety Appliances Company Humidity compensation for a photoionization type detector
JPH03500927A (ja) * 1987-10-26 1991-02-28 リサーチ　コーポレーシヨン　テクノロジーズ　インコーポレーテツド 赤外線放射検出
US5473162A (en) * 1987-10-26 1995-12-05 Baylor University Infrared emission detection of a gas
DE3935720A1 (de) * 1989-10-27 1991-05-02 Krc Umwelttechnik Gmbh Verfahren zur bestimmung des carbonatgehalts von waschsuspensionen
US5288645A (en) * 1992-09-04 1994-02-22 Mtm Engineering, Inc. Hydrogen evolution analyzer
JP3548999B2 (ja) * 2001-09-06 2004-08-04 独立行政法人 科学技術振興機構 ポンプ・プローブ法による光化学オゾン発生濃度推定方法及びその方法を利用した光化学オゾン発生濃度推定装置
EP1877770B1 (en) * 2005-05-02 2018-09-12 Thermo Fisher Scientific Inc. Method and apparatus for monitoring mercury in a gas sample
US8833140B2 (en) * 2011-07-18 2014-09-16 Bae Systems Information And Electronic Systems Integration Inc. Optically heated analyte desorber for gas chromatography analysis
EP3538884A4 (en) 2016-11-11 2020-07-29 Honeywell International Inc. PHOTOIONIZATION DETECTOR ULTRAVIOLET LAMP
CN114755329B (zh) * 2022-04-01 2022-11-11 北京东西分析仪器有限公司 一种臭氧层干扰物质的检测方法
CN116873869A (zh) * 2023-08-14 2023-10-13 多氟多新材料股份有限公司 一种电子级氢氟酸的制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3869362A (en) * 1973-01-11 1975-03-04 Ebara Mfg Process for removing noxious gas pollutants from effluent gases by irradiation
US4233030A (en) * 1977-03-08 1980-11-11 National Research Development Corporation Methods and apparatus for liquid chromatography
US4134344A (en) * 1977-04-11 1979-01-16 Pullman Incorporated Railway hopper car door lock
US4199419A (en) * 1978-12-28 1980-04-22 The United State Of America As Represented By The Department Of Energy Photochemical method for generating superoxide radicals (O2-) in aqueous solutions
US4309385A (en) * 1979-01-26 1982-01-05 Nippon Sanso K.K. Apparatus for measuring volatile hydrides

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03114754U (enExample) * 1990-03-05 1991-11-26

Also Published As

Publication number Publication date
US4698314A (en) 1987-10-06
JPS61118647A (ja) 1986-06-05

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term