JPH0157286B2 - - Google Patents

Info

Publication number
JPH0157286B2
JPH0157286B2 JP56068888A JP6888881A JPH0157286B2 JP H0157286 B2 JPH0157286 B2 JP H0157286B2 JP 56068888 A JP56068888 A JP 56068888A JP 6888881 A JP6888881 A JP 6888881A JP H0157286 B2 JPH0157286 B2 JP H0157286B2
Authority
JP
Japan
Prior art keywords
displacement
traveling table
servo
traveling
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56068888A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57184901A (en
Inventor
Hidezo Sano
Ryuichi Funatsu
Masayoshi Serizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56068888A priority Critical patent/JPS57184901A/ja
Publication of JPS57184901A publication Critical patent/JPS57184901A/ja
Publication of JPH0157286B2 publication Critical patent/JPH0157286B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP56068888A 1981-05-09 1981-05-09 Correcting device for degree of straight of straight travelling table Granted JPS57184901A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56068888A JPS57184901A (en) 1981-05-09 1981-05-09 Correcting device for degree of straight of straight travelling table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56068888A JPS57184901A (en) 1981-05-09 1981-05-09 Correcting device for degree of straight of straight travelling table

Publications (2)

Publication Number Publication Date
JPS57184901A JPS57184901A (en) 1982-11-13
JPH0157286B2 true JPH0157286B2 (enrdf_load_stackoverflow) 1989-12-05

Family

ID=13386640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56068888A Granted JPS57184901A (en) 1981-05-09 1981-05-09 Correcting device for degree of straight of straight travelling table

Country Status (1)

Country Link
JP (1) JPS57184901A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60224009A (ja) * 1984-04-20 1985-11-08 Mitsutoyo Mfg Co Ltd 自動三次元測定機
JPH0676886B2 (ja) * 1986-04-30 1994-09-28 株式会社東京精密 ブリツジ型移動装置
JP2567811B2 (ja) * 1994-02-14 1996-12-25 キヤノン株式会社 走査型露光装置
JP5447198B2 (ja) * 2010-06-08 2014-03-19 株式会社デンソー 回転体のバランス計測装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5397859A (en) * 1977-02-08 1978-08-26 Fujitsu Ltd Plane positioning shifter
JPS586162B2 (ja) * 1977-04-07 1983-02-03 宮下 政和 微小位置決め装置

Also Published As

Publication number Publication date
JPS57184901A (en) 1982-11-13

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